JPH0183328U - - Google Patents
Info
- Publication number
- JPH0183328U JPH0183328U JP1987178556U JP17855687U JPH0183328U JP H0183328 U JPH0183328 U JP H0183328U JP 1987178556 U JP1987178556 U JP 1987178556U JP 17855687 U JP17855687 U JP 17855687U JP H0183328 U JPH0183328 U JP H0183328U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- nozzle
- dropper
- discharging
- coating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000013022 venting Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の実施例を示すレジスト塗布装
置の概略構成図、第２図は従来のレジスト塗布装
置の概略構成図、第３図は第１図のカツプ平面図
、第４図は本考案の他の実施例を示すノズルの拡
大図である。
１……被処理物、２……レジスト、３０……カ
ツプ、４０……容器、４１……逆止弁、４３……
ベロー、４４，４７……エアー弁、４５……ノズ
ル、４５ａ……ノズル先端部、４６……スポイト
、４８……圧縮部材、１４５ａ……ノズルキヤツ
プ。
FIG. 1 is a schematic diagram of a resist coating device showing an embodiment of the present invention, FIG. 2 is a schematic diagram of a conventional resist coating device, FIG. 3 is a plan view of the cup shown in FIG. FIG. 7 is an enlarged view of a nozzle showing another embodiment of the invention. 1...Product to be processed, 2...Resist, 30...Cup, 40...Container, 41...Check valve, 43...
Bellows, 44, 47...air valve, 45...nozzle, 45a...nozzle tip, 46...dropper, 48...compression member, 145a...nozzle cap.
Claims (1)
手段と、所定量のレジストを吸入、送出するレジ
スト供給手段と、このレジスト供給手段から供給
されたレジストを前記被処理物上に吐出するレジ
スト排出手段とを備えたレジスト塗布装置におい
て、 前記レジスト排出手段は、 前記レジスト供給手段に接続され前記レジスト
の粘度に応じた口径のレジスト吐出用のノズル先
端部を有するノズルと、 このノズルに取付けられ該ノズルに対して排出
圧を加える弾性体からなるスポイトと、 前記ノズル及びスポイトに接続されたエアー抜
き用のエアー弁と、 前記スポイトを所定速度で圧縮する圧縮部材と
を備えたことを特徴とするレジスト塗布装置。 ２ 前記ノズル先端部は、着脱自在構造である実
用新案登録請求の範囲第１項記載のレジスト塗布
装置。[Claims for Utility Model Registration] 1. A rotation means for rotating an object to be processed at a predetermined rotation speed, a resist supply means for sucking in and delivering a predetermined amount of resist, and a resist supplied from the resist supply means for transferring the resist to the substrate. In the resist coating apparatus, the resist discharging means includes a nozzle connected to the resist supplying means and having a nozzle tip for discharging resist with a diameter corresponding to the viscosity of the resist. a dropper made of an elastic body that is attached to the nozzle and applies discharge pressure to the nozzle; an air valve for venting air that is connected to the nozzle and the dropper; and a compression member that compresses the dropper at a predetermined speed. A resist coating device characterized by comprising: 2. The resist coating apparatus according to claim 1, wherein the nozzle tip has a detachable structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178556U JPH0183328U (en) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178556U JPH0183328U (en) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183328U true JPH0183328U (en) | 1989-06-02 |
Family
ID=31470166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178556U Pending JPH0183328U (en) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183328U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011204948A (en) * | 2010-03-26 | 2011-10-13 | Dainippon Screen Mfg Co Ltd | Treatment liquid supply device and treatment liquid supply method |
-
1987
- 1987-11-24 JP JP1987178556U patent/JPH0183328U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011204948A (en) * | 2010-03-26 | 2011-10-13 | Dainippon Screen Mfg Co Ltd | Treatment liquid supply device and treatment liquid supply method |
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