JPH0183063U - - Google Patents

Info

Publication number

JPH0183063U

JPH0183063U JP1987175515U JP17551587U JPH0183063U JP H0183063 U JPH0183063 U JP H0183063U JP 1987175515 U JP1987175515 U JP 1987175515U JP 17551587 U JP17551587 U JP 17551587U JP H0183063 U JPH0183063 U JP H0183063U

Authority

JP

Japan

Prior art keywords

substrate

vacuum chamber

evaporation material

evaporation

disposed

Prior art date

1987-11-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000001704 evaporation Methods 0.000 claims description 12
• 230000008020 evaporation Effects 0.000 claims description 11
• 239000000758 substrate Substances 0.000 claims description 8
• 238000007733 ion plating Methods 0.000 claims description 5
• 230000006698 induction Effects 0.000 claims description 3
• 239000000463 material Substances 0.000 claims 6
• 230000002093 peripheral effect Effects 0.000 claims 1
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 238000002347 injection Methods 0.000 description 1
• 239000007924 injection Substances 0.000 description 1
• 239000004408 titanium dioxide Substances 0.000 description 1