JPH0180681U - - Google Patents
Info
- Publication number
- JPH0180681U JPH0180681U JP1987176796U JP17679687U JPH0180681U JP H0180681 U JPH0180681 U JP H0180681U JP 1987176796 U JP1987176796 U JP 1987176796U JP 17679687 U JP17679687 U JP 17679687U JP H0180681 U JPH0180681 U JP H0180681U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- refrigerator
- cold head
- filamentous
- activated carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 2
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17679687U JPH0544547Y2 (https=) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17679687U JPH0544547Y2 (https=) | 1987-11-19 | 1987-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180681U true JPH0180681U (https=) | 1989-05-30 |
| JPH0544547Y2 JPH0544547Y2 (https=) | 1993-11-11 |
Family
ID=31468499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17679687U Expired - Lifetime JPH0544547Y2 (https=) | 1987-11-19 | 1987-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544547Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019168014A1 (ja) * | 2018-03-02 | 2019-09-06 | 住友重機械工業株式会社 | クライオポンプ |
-
1987
- 1987-11-19 JP JP17679687U patent/JPH0544547Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019168014A1 (ja) * | 2018-03-02 | 2019-09-06 | 住友重機械工業株式会社 | クライオポンプ |
| US11828521B2 (en) | 2018-03-02 | 2023-11-28 | Sumitomo Heavy Industries, Ltd. | Cryopump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0544547Y2 (https=) | 1993-11-11 |