JPH0180681U - - Google Patents
Info
- Publication number
- JPH0180681U JPH0180681U JP1987176796U JP17679687U JPH0180681U JP H0180681 U JPH0180681 U JP H0180681U JP 1987176796 U JP1987176796 U JP 1987176796U JP 17679687 U JP17679687 U JP 17679687U JP H0180681 U JPH0180681 U JP H0180681U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- refrigerator
- cold head
- filamentous
- activated carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 2
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案におけるクライオポンプの概略
構成説明図、第２図は本考案におけるクライオポ
ンプの吸着剤の説明図、第３図は本考案における
クライオポンプの要部説明図、第４図は第３図に
おけるＡＡ断面図である。
４……クライオパネル、７……糸状の活性炭、
８……糸状の金属、９……吸着剤、１０……上部
パネル、、１１……巻付け用パネル、１２……凝
縮パネル、１３……下部パネル。
Fig. 1 is an explanatory diagram of the general structure of the cryopump in the present invention, Fig. 2 is an explanatory diagram of the adsorbent of the cryopump in the present invention, Fig. 3 is an explanatory diagram of the main parts of the cryopump in the present invention, and Fig. 4 is an explanatory diagram of the main parts of the cryopump in the present invention. It is an AA sectional view in FIG. 3. 4... Cryopanel, 7... Filiform activated carbon,
8... Thread-like metal, 9... Adsorbent, 10... Upper panel, 11... Wrapping panel, 12... Condensation panel, 13... Lower panel.
Claims (1)
を囲むように前記コールドヘツドに取り付けられ
た吸着パネルとをポンプケース内に備えているク
ライオポンプにおいて、糸状の活性炭と糸状の金
属とをねじつて形成した糸状体を前記吸着パネル
に巻き付けてなることを特徴とするクライオポン
プ。 A cryopump comprising a refrigerator having a cold head and an adsorption panel attached to the cold head surrounding the refrigerator in a pump case, which is formed by twisting filamentous activated carbon and filamentous metal. A cryopump characterized in that a filament is wound around the suction panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17679687U JPH0544547Y2 (en) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17679687U JPH0544547Y2 (en) | 1987-11-19 | 1987-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180681U true JPH0180681U (en) | 1989-05-30 |
| JPH0544547Y2 JPH0544547Y2 (en) | 1993-11-11 |
Family
ID=31468499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17679687U Expired - Lifetime JPH0544547Y2 (en) | 1987-11-19 | 1987-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544547Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019168014A1 (en) * | 2018-03-02 | 2019-09-06 | 住友重機械工業株式会社 | Cryopump |
-
1987
- 1987-11-19 JP JP17679687U patent/JPH0544547Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019168014A1 (en) * | 2018-03-02 | 2019-09-06 | 住友重機械工業株式会社 | Cryopump |
| US11828521B2 (en) | 2018-03-02 | 2023-11-28 | Sumitomo Heavy Industries, Ltd. | Cryopump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0544547Y2 (en) | 1993-11-11 |