JPH0180681U - - Google Patents

Info

Publication number
JPH0180681U
JPH0180681U JP1987176796U JP17679687U JPH0180681U JP H0180681 U JPH0180681 U JP H0180681U JP 1987176796 U JP1987176796 U JP 1987176796U JP 17679687 U JP17679687 U JP 17679687U JP H0180681 U JPH0180681 U JP H0180681U
Authority
JP
Japan
Prior art keywords
cryopump
refrigerator
cold head
filamentous
activated carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987176796U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544547Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17679687U priority Critical patent/JPH0544547Y2/ja
Publication of JPH0180681U publication Critical patent/JPH0180681U/ja
Application granted granted Critical
Publication of JPH0544547Y2 publication Critical patent/JPH0544547Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP17679687U 1987-11-19 1987-11-19 Expired - Lifetime JPH0544547Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17679687U JPH0544547Y2 (enrdf_load_stackoverflow) 1987-11-19 1987-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17679687U JPH0544547Y2 (enrdf_load_stackoverflow) 1987-11-19 1987-11-19

Publications (2)

Publication Number Publication Date
JPH0180681U true JPH0180681U (enrdf_load_stackoverflow) 1989-05-30
JPH0544547Y2 JPH0544547Y2 (enrdf_load_stackoverflow) 1993-11-11

Family

ID=31468499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17679687U Expired - Lifetime JPH0544547Y2 (enrdf_load_stackoverflow) 1987-11-19 1987-11-19

Country Status (1)

Country Link
JP (1) JPH0544547Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019168014A1 (ja) * 2018-03-02 2019-09-06 住友重機械工業株式会社 クライオポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019168014A1 (ja) * 2018-03-02 2019-09-06 住友重機械工業株式会社 クライオポンプ
US11828521B2 (en) 2018-03-02 2023-11-28 Sumitomo Heavy Industries, Ltd. Cryopump

Also Published As

Publication number Publication date
JPH0544547Y2 (enrdf_load_stackoverflow) 1993-11-11

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