JPH0179840U - - Google Patents

Info

Publication number
JPH0179840U
JPH0179840U JP1987175267U JP17526787U JPH0179840U JP H0179840 U JPH0179840 U JP H0179840U JP 1987175267 U JP1987175267 U JP 1987175267U JP 17526787 U JP17526787 U JP 17526787U JP H0179840 U JPH0179840 U JP H0179840U
Authority
JP
Japan
Prior art keywords
grooves
detection mechanism
pitch detection
pitch
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987175267U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987175267U priority Critical patent/JPH0179840U/ja
Publication of JPH0179840U publication Critical patent/JPH0179840U/ja
Pending legal-status Critical Current

Links

JP1987175267U 1987-11-17 1987-11-17 Pending JPH0179840U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987175267U JPH0179840U (US20100268047A1-20101021-C00003.png) 1987-11-17 1987-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987175267U JPH0179840U (US20100268047A1-20101021-C00003.png) 1987-11-17 1987-11-17

Publications (1)

Publication Number Publication Date
JPH0179840U true JPH0179840U (US20100268047A1-20101021-C00003.png) 1989-05-29

Family

ID=31467072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987175267U Pending JPH0179840U (US20100268047A1-20101021-C00003.png) 1987-11-17 1987-11-17

Country Status (1)

Country Link
JP (1) JPH0179840U (US20100268047A1-20101021-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03133152A (ja) * 1989-10-18 1991-06-06 Yodogawa Kasei Kk ガラス基板用カセット
JPH04162745A (ja) * 1990-10-26 1992-06-08 Fujitsu Ltd ウエハの移し換え方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03133152A (ja) * 1989-10-18 1991-06-06 Yodogawa Kasei Kk ガラス基板用カセット
JPH04162745A (ja) * 1990-10-26 1992-06-08 Fujitsu Ltd ウエハの移し換え方法

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