JPH0178027U - - Google Patents

Info

Publication number
JPH0178027U
JPH0178027U JP1987172532U JP17253287U JPH0178027U JP H0178027 U JPH0178027 U JP H0178027U JP 1987172532 U JP1987172532 U JP 1987172532U JP 17253287 U JP17253287 U JP 17253287U JP H0178027 U JPH0178027 U JP H0178027U
Authority
JP
Japan
Prior art keywords
wafer
plasma light
flat plate
electrodes
end point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987172532U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172532U priority Critical patent/JPH0178027U/ja
Publication of JPH0178027U publication Critical patent/JPH0178027U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987172532U 1987-11-11 1987-11-11 Pending JPH0178027U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172532U JPH0178027U (enrdf_load_stackoverflow) 1987-11-11 1987-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172532U JPH0178027U (enrdf_load_stackoverflow) 1987-11-11 1987-11-11

Publications (1)

Publication Number Publication Date
JPH0178027U true JPH0178027U (enrdf_load_stackoverflow) 1989-05-25

Family

ID=31464501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172532U Pending JPH0178027U (enrdf_load_stackoverflow) 1987-11-11 1987-11-11

Country Status (1)

Country Link
JP (1) JPH0178027U (enrdf_load_stackoverflow)

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