JPH0178024U - - Google Patents
Info
- Publication number
- JPH0178024U JPH0178024U JP1987173574U JP17357487U JPH0178024U JP H0178024 U JPH0178024 U JP H0178024U JP 1987173574 U JP1987173574 U JP 1987173574U JP 17357487 U JP17357487 U JP 17357487U JP H0178024 U JPH0178024 U JP H0178024U
- Authority
- JP
- Japan
- Prior art keywords
- heating plate
- substrate
- lid
- heat
- cylindrical body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987173574U JPH0178024U (es) | 1987-11-12 | 1987-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987173574U JPH0178024U (es) | 1987-11-12 | 1987-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0178024U true JPH0178024U (es) | 1989-05-25 |
Family
ID=31465478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987173574U Pending JPH0178024U (es) | 1987-11-12 | 1987-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0178024U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000100807A (ja) * | 1998-09-21 | 2000-04-07 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
-
1987
- 1987-11-12 JP JP1987173574U patent/JPH0178024U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000100807A (ja) * | 1998-09-21 | 2000-04-07 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |