JPH0177935U - - Google Patents
Info
- Publication number
- JPH0177935U JPH0177935U JP1987172025U JP17202587U JPH0177935U JP H0177935 U JPH0177935 U JP H0177935U JP 1987172025 U JP1987172025 U JP 1987172025U JP 17202587 U JP17202587 U JP 17202587U JP H0177935 U JPH0177935 U JP H0177935U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- pedestal
- groove
- semiconductor
- diaphragm element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172025U JPH0547393Y2 (es) | 1987-11-12 | 1987-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172025U JPH0547393Y2 (es) | 1987-11-12 | 1987-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0177935U true JPH0177935U (es) | 1989-05-25 |
| JPH0547393Y2 JPH0547393Y2 (es) | 1993-12-14 |
Family
ID=31464021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172025U Expired - Lifetime JPH0547393Y2 (es) | 1987-11-12 | 1987-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0547393Y2 (es) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57161528A (en) * | 1981-03-30 | 1982-10-05 | Mitsubishi Electric Corp | Pressure to electricity converter |
-
1987
- 1987-11-12 JP JP1987172025U patent/JPH0547393Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0547393Y2 (es) | 1993-12-14 |