JPH0177838U - - Google Patents
Info
- Publication number
- JPH0177838U JPH0177838U JP1987171464U JP17146487U JPH0177838U JP H0177838 U JPH0177838 U JP H0177838U JP 1987171464 U JP1987171464 U JP 1987171464U JP 17146487 U JP17146487 U JP 17146487U JP H0177838 U JPH0177838 U JP H0177838U
- Authority
- JP
- Japan
- Prior art keywords
- grounded electrode
- guide roller
- plasma processing
- processed
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004744 fabric Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171464U JPH0177838U (de) | 1987-11-10 | 1987-11-10 | |
| US07/214,179 US4968918A (en) | 1987-07-06 | 1988-07-01 | Apparatus for plasma treatment |
| EP88110707A EP0298420B1 (de) | 1987-07-06 | 1988-07-05 | Plasma-Bearbeitungsgerät |
| DE3887933T DE3887933T2 (de) | 1987-07-06 | 1988-07-05 | Plasma-Bearbeitungsgerät. |
| KR1019880008345A KR950001541B1 (ko) | 1987-07-06 | 1988-07-06 | 플라즈마처리용 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171464U JPH0177838U (de) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177838U true JPH0177838U (de) | 1989-05-25 |
Family
ID=31463319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171464U Pending JPH0177838U (de) | 1987-07-06 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177838U (de) |
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1987
- 1987-11-10 JP JP1987171464U patent/JPH0177838U/ja active Pending