JPH0174547U - - Google Patents

Info

Publication number
JPH0174547U
JPH0174547U JP1987169451U JP16945187U JPH0174547U JP H0174547 U JPH0174547 U JP H0174547U JP 1987169451 U JP1987169451 U JP 1987169451U JP 16945187 U JP16945187 U JP 16945187U JP H0174547 U JPH0174547 U JP H0174547U
Authority
JP
Japan
Prior art keywords
laser beam
abnormality detection
abnormality
focused
test object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987169451U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648399Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987169451U priority Critical patent/JPH0648399Y2/ja
Publication of JPH0174547U publication Critical patent/JPH0174547U/ja
Application granted granted Critical
Publication of JPH0648399Y2 publication Critical patent/JPH0648399Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1987169451U 1987-11-05 1987-11-05 非接触微小表面異常検出装置 Expired - Lifetime JPH0648399Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987169451U JPH0648399Y2 (ja) 1987-11-05 1987-11-05 非接触微小表面異常検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987169451U JPH0648399Y2 (ja) 1987-11-05 1987-11-05 非接触微小表面異常検出装置

Publications (2)

Publication Number Publication Date
JPH0174547U true JPH0174547U (US20080293856A1-20081127-C00150.png) 1989-05-19
JPH0648399Y2 JPH0648399Y2 (ja) 1994-12-12

Family

ID=31459520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987169451U Expired - Lifetime JPH0648399Y2 (ja) 1987-11-05 1987-11-05 非接触微小表面異常検出装置

Country Status (1)

Country Link
JP (1) JPH0648399Y2 (US20080293856A1-20081127-C00150.png)

Also Published As

Publication number Publication date
JPH0648399Y2 (ja) 1994-12-12

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