JPH0174511U - - Google Patents

Info

Publication number

JPH0174511U

JPH0174511U JP1987169673U JP16967387U JPH0174511U JP H0174511 U JPH0174511 U JP H0174511U JP 1987169673 U JP1987169673 U JP 1987169673U JP 16967387 U JP16967387 U JP 16967387U JP H0174511 U JPH0174511 U JP H0174511U

Authority

JP

Japan

Prior art keywords

film thickness

sample stage

measuring device

thickness measuring

light

Prior art date

1987-11-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010408 film Substances 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 3
• 238000003780 insertion Methods 0.000 claims description 2
• 230000037431 insertion Effects 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 238000000034 method Methods 0.000 claims 1
• 238000001634 microspectroscopy Methods 0.000 claims 1
• 238000003384 imaging method Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 229910052736 halogen Inorganic materials 0.000 description 1
• 150000002367 halogens Chemical class 0.000 description 1

Cited By (1)