JPH0174263U - - Google Patents
Info
- Publication number
- JPH0174263U JPH0174263U JP1987168719U JP16871987U JPH0174263U JP H0174263 U JPH0174263 U JP H0174263U JP 1987168719 U JP1987168719 U JP 1987168719U JP 16871987 U JP16871987 U JP 16871987U JP H0174263 U JPH0174263 U JP H0174263U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- mounting plate
- substrate mounting
- evaporator
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168719U JPH0174263U (en:Method) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168719U JPH0174263U (en:Method) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174263U true JPH0174263U (en:Method) | 1989-05-19 |
Family
ID=31458142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168719U Pending JPH0174263U (en:Method) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174263U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008240105A (ja) * | 2007-03-28 | 2008-10-09 | Showa Shinku:Kk | 基板ホルダ、成膜装置及び成膜方法 |
-
1987
- 1987-11-04 JP JP1987168719U patent/JPH0174263U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008240105A (ja) * | 2007-03-28 | 2008-10-09 | Showa Shinku:Kk | 基板ホルダ、成膜装置及び成膜方法 |
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