JPH0174263U - - Google Patents

Info

Publication number
JPH0174263U
JPH0174263U JP1987168719U JP16871987U JPH0174263U JP H0174263 U JPH0174263 U JP H0174263U JP 1987168719 U JP1987168719 U JP 1987168719U JP 16871987 U JP16871987 U JP 16871987U JP H0174263 U JPH0174263 U JP H0174263U
Authority
JP
Japan
Prior art keywords
turntable
mounting plate
substrate mounting
evaporator
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987168719U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987168719U priority Critical patent/JPH0174263U/ja
Publication of JPH0174263U publication Critical patent/JPH0174263U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987168719U 1987-11-04 1987-11-04 Pending JPH0174263U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987168719U JPH0174263U (enrdf_load_stackoverflow) 1987-11-04 1987-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987168719U JPH0174263U (enrdf_load_stackoverflow) 1987-11-04 1987-11-04

Publications (1)

Publication Number Publication Date
JPH0174263U true JPH0174263U (enrdf_load_stackoverflow) 1989-05-19

Family

ID=31458142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987168719U Pending JPH0174263U (enrdf_load_stackoverflow) 1987-11-04 1987-11-04

Country Status (1)

Country Link
JP (1) JPH0174263U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008240105A (ja) * 2007-03-28 2008-10-09 Showa Shinku:Kk 基板ホルダ、成膜装置及び成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008240105A (ja) * 2007-03-28 2008-10-09 Showa Shinku:Kk 基板ホルダ、成膜装置及び成膜方法

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