JPH0174262U - - Google Patents
Info
- Publication number
- JPH0174262U JPH0174262U JP1987167295U JP16729587U JPH0174262U JP H0174262 U JPH0174262 U JP H0174262U JP 1987167295 U JP1987167295 U JP 1987167295U JP 16729587 U JP16729587 U JP 16729587U JP H0174262 U JPH0174262 U JP H0174262U
- Authority
- JP
- Japan
- Prior art keywords
- target material
- vacuum chamber
- film
- forming body
- sputtering apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013077 target material Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167295U JPH0174262U (enExample) | 1987-10-31 | 1987-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167295U JPH0174262U (enExample) | 1987-10-31 | 1987-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174262U true JPH0174262U (enExample) | 1989-05-19 |
Family
ID=31455456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167295U Pending JPH0174262U (enExample) | 1987-10-31 | 1987-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174262U (enExample) |
-
1987
- 1987-10-31 JP JP1987167295U patent/JPH0174262U/ja active Pending