JPH0174260U - - Google Patents
Info
- Publication number
- JPH0174260U JPH0174260U JP1987168720U JP16872087U JPH0174260U JP H0174260 U JPH0174260 U JP H0174260U JP 1987168720 U JP1987168720 U JP 1987168720U JP 16872087 U JP16872087 U JP 16872087U JP H0174260 U JPH0174260 U JP H0174260U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- duct
- hollow part
- communicating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168720U JPH0174260U (es) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168720U JPH0174260U (es) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174260U true JPH0174260U (es) | 1989-05-19 |
Family
ID=31458144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168720U Pending JPH0174260U (es) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174260U (es) |
-
1987
- 1987-11-04 JP JP1987168720U patent/JPH0174260U/ja active Pending