JPS61112843U - - Google Patents
Info
- Publication number
- JPS61112843U JPS61112843U JP19789384U JP19789384U JPS61112843U JP S61112843 U JPS61112843 U JP S61112843U JP 19789384 U JP19789384 U JP 19789384U JP 19789384 U JP19789384 U JP 19789384U JP S61112843 U JPS61112843 U JP S61112843U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- table plate
- holes
- hole
- fits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002699 waste material Substances 0.000 claims description 2
- 238000009827 uniform distribution Methods 0.000 claims 1
Landscapes
- Milling, Drilling, And Turning Of Wood (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19789384U JPS61112843U (es) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19789384U JPS61112843U (es) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112843U true JPS61112843U (es) | 1986-07-17 |
Family
ID=30756429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19789384U Pending JPS61112843U (es) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112843U (es) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0549305U (ja) * | 1991-07-24 | 1993-06-29 | 株式会社平安コーポレーション | Ｎｃルータの吸着テーブル装置 |
| KR101124372B1 (ko) | 2009-07-31 | 2012-03-23 | 주식회사 썬테크 | 진공척 |
| JP2021077904A (ja) * | 2021-01-21 | 2021-05-20 | 株式会社日本製鋼所 | レーザ照射装置 |
| US11676831B2 (en) | 2017-03-16 | 2023-06-13 | Jsw Aktina System Co., Ltd | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028386B2 (es) * | 1971-12-20 | 1975-09-13 |
-
1984
- 1984-12-28 JP JP19789384U patent/JPS61112843U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028386B2 (es) * | 1971-12-20 | 1975-09-13 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0549305U (ja) * | 1991-07-24 | 1993-06-29 | 株式会社平安コーポレーション | Ｎｃルータの吸着テーブル装置 |
| KR101124372B1 (ko) | 2009-07-31 | 2012-03-23 | 주식회사 썬테크 | 진공척 |
| US11676831B2 (en) | 2017-03-16 | 2023-06-13 | Jsw Aktina System Co., Ltd | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device |
| JP2021077904A (ja) * | 2021-01-21 | 2021-05-20 | 株式会社日本製鋼所 | レーザ照射装置 |