JPH0173940U - - Google Patents
Info
- Publication number
- JPH0173940U JPH0173940U JP1987169646U JP16964687U JPH0173940U JP H0173940 U JPH0173940 U JP H0173940U JP 1987169646 U JP1987169646 U JP 1987169646U JP 16964687 U JP16964687 U JP 16964687U JP H0173940 U JPH0173940 U JP H0173940U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- jig
- bonded together
- semiconductor substrates
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 102100025490 Slit homolog 1 protein Human genes 0.000 claims 1
- 101710123186 Slit homolog 1 protein Proteins 0.000 claims 1
Landscapes
- Local Oxidation Of Silicon (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16964687U JPH0650978Y2 (ja) | 1987-11-05 | 1987-11-05 | 貼り合わせｓｏｉ半導体基板製造用治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16964687U JPH0650978Y2 (ja) | 1987-11-05 | 1987-11-05 | 貼り合わせｓｏｉ半導体基板製造用治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0173940U true JPH0173940U (OSRAM) | 1989-05-18 |
| JPH0650978Y2 JPH0650978Y2 (ja) | 1994-12-21 |
Family
ID=31459891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16964687U Expired - Lifetime JPH0650978Y2 (ja) | 1987-11-05 | 1987-11-05 | 貼り合わせｓｏｉ半導体基板製造用治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650978Y2 (OSRAM) |
-
1987
- 1987-11-05 JP JP16964687U patent/JPH0650978Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650978Y2 (ja) | 1994-12-21 |