JPH0173928U - - Google Patents
Info
- Publication number
- JPH0173928U JPH0173928U JP1987167930U JP16793087U JPH0173928U JP H0173928 U JPH0173928 U JP H0173928U JP 1987167930 U JP1987167930 U JP 1987167930U JP 16793087 U JP16793087 U JP 16793087U JP H0173928 U JPH0173928 U JP H0173928U
- Authority
- JP
- Japan
- Prior art keywords
- plasma emission
- decrease
- emission intensity
- end point
- etching end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167930U JPH0173928U (zh) | 1987-11-04 | 1987-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167930U JPH0173928U (zh) | 1987-11-04 | 1987-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173928U true JPH0173928U (zh) | 1989-05-18 |
Family
ID=31456664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167930U Pending JPH0173928U (zh) | 1987-11-04 | 1987-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173928U (zh) |
-
1987
- 1987-11-04 JP JP1987167930U patent/JPH0173928U/ja active Pending