JPH0173312U - - Google Patents
Info
- Publication number
- JPH0173312U JPH0173312U JP1987166453U JP16645387U JPH0173312U JP H0173312 U JPH0173312 U JP H0173312U JP 1987166453 U JP1987166453 U JP 1987166453U JP 16645387 U JP16645387 U JP 16645387U JP H0173312 U JPH0173312 U JP H0173312U
- Authority
- JP
- Japan
- Prior art keywords
- liquid supply
- chemical liquid
- filter
- supply pump
- captures particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressor (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166453U JPH0444166Y2 (sv) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166453U JPH0444166Y2 (sv) | 1987-10-30 | 1987-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0173312U true JPH0173312U (sv) | 1989-05-17 |
| JPH0444166Y2 JPH0444166Y2 (sv) | 1992-10-19 |
Family
ID=31453847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166453U Expired JPH0444166Y2 (sv) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444166Y2 (sv) |
-
1987
- 1987-10-30 JP JP1987166453U patent/JPH0444166Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444166Y2 (sv) | 1992-10-19 |