JPH0172992U - - Google Patents

Info

Publication number
JPH0172992U
JPH0172992U JP1987167841U JP16784187U JPH0172992U JP H0172992 U JPH0172992 U JP H0172992U JP 1987167841 U JP1987167841 U JP 1987167841U JP 16784187 U JP16784187 U JP 16784187U JP H0172992 U JPH0172992 U JP H0172992U
Authority
JP
Japan
Prior art keywords
workpiece
nozzle body
linearly polarized
polarization direction
polarized beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987167841U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987167841U priority Critical patent/JPH0172992U/ja
Publication of JPH0172992U publication Critical patent/JPH0172992U/ja
Pending legal-status Critical Current

Links

JP1987167841U 1987-11-04 1987-11-04 Pending JPH0172992U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987167841U JPH0172992U (ko) 1987-11-04 1987-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987167841U JPH0172992U (ko) 1987-11-04 1987-11-04

Publications (1)

Publication Number Publication Date
JPH0172992U true JPH0172992U (ko) 1989-05-17

Family

ID=31456497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987167841U Pending JPH0172992U (ko) 1987-11-04 1987-11-04

Country Status (1)

Country Link
JP (1) JPH0172992U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004009139A (ja) * 2002-06-10 2004-01-15 New Wave Research ダイを製造する方法及びシステム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004009139A (ja) * 2002-06-10 2004-01-15 New Wave Research ダイを製造する方法及びシステム

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