JPH0171856U - - Google Patents

Info

Publication number
JPH0171856U
JPH0171856U JP1987166877U JP16687787U JPH0171856U JP H0171856 U JPH0171856 U JP H0171856U JP 1987166877 U JP1987166877 U JP 1987166877U JP 16687787 U JP16687787 U JP 16687787U JP H0171856 U JPH0171856 U JP H0171856U
Authority
JP
Japan
Prior art keywords
gate valve
main body
sample
analyzer
exhaust chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987166877U
Other languages
Japanese (ja)
Other versions
JP2519083Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987166877U priority Critical patent/JP2519083Y2/en
Publication of JPH0171856U publication Critical patent/JPH0171856U/ja
Application granted granted Critical
Publication of JP2519083Y2 publication Critical patent/JP2519083Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例の側面図、第2図は
第2実施例の要部側面図である。 1……分析装置本体、4……予備排気室、7…
…ゲートバルブ、8……試料交換棒、S……試料
、P……光源、Q……光検出器、m……鏡、M…
…ゲートバルブ駆動モータ、R……リレー、C…
…リレーRの接点。
FIG. 1 is a side view of one embodiment of the present invention, and FIG. 2 is a side view of essential parts of the second embodiment. 1... Analyzer main body, 4... Pre-exhaust chamber, 7...
...Gate valve, 8...Sample exchange rod, S...Sample, P...Light source, Q...Photodetector, m...Mirror, M...
...Gate valve drive motor, R...Relay, C...
...Relay R contact.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空を要する分析装置本体と予備排気室を有す
る分析装置において、分析装置本体と予備排気室
との間を開閉するゲートバルブの通過軌跡と試料
およびその付属部分、試料交換棒等の通過軌跡と
の交わる空間を視領域とするように光電的物体セ
ンサを配置し、この物体センサの物体検知信号に
よつて警告或はゲートバルブの駆動を禁止するよ
うにした試料交換装置。
In an analyzer that has an analyzer main body and a preliminary exhaust chamber that require a vacuum, the passage trajectory of the gate valve that opens and closes between the analyzer main body and the preliminary exhaust chamber and the passage trajectory of the sample, its attached parts, sample exchange rod, etc. A sample exchange device in which a photoelectric object sensor is arranged so that the intersecting space is a visual area, and the object detection signal from the object sensor is used to issue a warning or prohibit the driving of a gate valve.
JP1987166877U 1987-10-31 1987-10-31 Sample exchange device Expired - Lifetime JP2519083Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987166877U JP2519083Y2 (en) 1987-10-31 1987-10-31 Sample exchange device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987166877U JP2519083Y2 (en) 1987-10-31 1987-10-31 Sample exchange device

Publications (2)

Publication Number Publication Date
JPH0171856U true JPH0171856U (en) 1989-05-15
JP2519083Y2 JP2519083Y2 (en) 1996-12-04

Family

ID=31454656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987166877U Expired - Lifetime JP2519083Y2 (en) 1987-10-31 1987-10-31 Sample exchange device

Country Status (1)

Country Link
JP (1) JP2519083Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019187352A1 (en) * 2018-03-30 2019-10-03 株式会社島津製作所 Vacuum device and mass spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019187352A1 (en) * 2018-03-30 2019-10-03 株式会社島津製作所 Vacuum device and mass spectrometer

Also Published As

Publication number Publication date
JP2519083Y2 (en) 1996-12-04

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