JPH0171612U - - Google Patents
Info
- Publication number
- JPH0171612U JPH0171612U JP1987168360U JP16836087U JPH0171612U JP H0171612 U JPH0171612 U JP H0171612U JP 1987168360 U JP1987168360 U JP 1987168360U JP 16836087 U JP16836087 U JP 16836087U JP H0171612 U JPH0171612 U JP H0171612U
- Authority
- JP
- Japan
- Prior art keywords
- light
- slit
- light source
- position detector
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168360U JPH0171612U (pl) | 1987-11-02 | 1987-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987168360U JPH0171612U (pl) | 1987-11-02 | 1987-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171612U true JPH0171612U (pl) | 1989-05-12 |
Family
ID=31457472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987168360U Pending JPH0171612U (pl) | 1987-11-02 | 1987-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171612U (pl) |
-
1987
- 1987-11-02 JP JP1987168360U patent/JPH0171612U/ja active Pending
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