JPH0171436U - - Google Patents

Info

Publication number

JPH0171436U

JPH0171436U JP1987168083U JP16808387U JPH0171436U JP H0171436 U JPH0171436 U JP H0171436U JP 1987168083 U JP1987168083 U JP 1987168083U JP 16808387 U JP16808387 U JP 16808387U JP H0171436 U JPH0171436 U JP H0171436U

Authority

JP

Japan

Prior art keywords

atmospheric gas

irradiating

ports

semiconductor substrate

heat treatment

Prior art date

1987-11-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000000137 annealing Methods 0.000 claims description 3
• 239000010453 quartz Substances 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 229910052736 halogen Inorganic materials 0.000 claims 1
• 150000002367 halogens Chemical class 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1