JPH0170744U - - Google Patents

Info

Publication number
JPH0170744U
JPH0170744U JP1987165977U JP16597787U JPH0170744U JP H0170744 U JPH0170744 U JP H0170744U JP 1987165977 U JP1987165977 U JP 1987165977U JP 16597787 U JP16597787 U JP 16597787U JP H0170744 U JPH0170744 U JP H0170744U
Authority
JP
Japan
Prior art keywords
chuck body
vacuum chamber
sleeve
vacuum
communicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987165977U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987165977U priority Critical patent/JPH0170744U/ja
Publication of JPH0170744U publication Critical patent/JPH0170744U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1987165977U 1987-10-29 1987-10-29 Pending JPH0170744U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987165977U JPH0170744U (enrdf_load_stackoverflow) 1987-10-29 1987-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987165977U JPH0170744U (enrdf_load_stackoverflow) 1987-10-29 1987-10-29

Publications (1)

Publication Number Publication Date
JPH0170744U true JPH0170744U (enrdf_load_stackoverflow) 1989-05-11

Family

ID=31452952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987165977U Pending JPH0170744U (enrdf_load_stackoverflow) 1987-10-29 1987-10-29

Country Status (1)

Country Link
JP (1) JPH0170744U (enrdf_load_stackoverflow)

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