JPH0170143U - - Google Patents
Info
- Publication number
- JPH0170143U JPH0170143U JP1987165937U JP16593787U JPH0170143U JP H0170143 U JPH0170143 U JP H0170143U JP 1987165937 U JP1987165937 U JP 1987165937U JP 16593787 U JP16593787 U JP 16593787U JP H0170143 U JPH0170143 U JP H0170143U
- Authority
- JP
- Japan
- Prior art keywords
- leak
- vacuum
- pump
- vacuum chamber
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16593787U JPH0453558Y2 (en, 2012) | 1987-10-29 | 1987-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16593787U JPH0453558Y2 (en, 2012) | 1987-10-29 | 1987-10-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170143U true JPH0170143U (en, 2012) | 1989-05-10 |
| JPH0453558Y2 JPH0453558Y2 (en, 2012) | 1992-12-16 |
Family
ID=31452873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16593787U Expired JPH0453558Y2 (en, 2012) | 1987-10-29 | 1987-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453558Y2 (en, 2012) |
-
1987
- 1987-10-29 JP JP16593787U patent/JPH0453558Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453558Y2 (en, 2012) | 1992-12-16 |