JPH0170042U - - Google Patents

Info

Publication number
JPH0170042U
JPH0170042U JP1987164091U JP16409187U JPH0170042U JP H0170042 U JPH0170042 U JP H0170042U JP 1987164091 U JP1987164091 U JP 1987164091U JP 16409187 U JP16409187 U JP 16409187U JP H0170042 U JPH0170042 U JP H0170042U
Authority
JP
Japan
Prior art keywords
ceiling
blower
ceiling chamber
return port
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987164091U
Other languages
English (en)
Japanese (ja)
Other versions
JPH042346Y2 (US20020125480A1-20020912-P00900.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16409187U priority Critical patent/JPH042346Y2/ja
Publication of JPH0170042U publication Critical patent/JPH0170042U/ja
Application granted granted Critical
Publication of JPH042346Y2 publication Critical patent/JPH042346Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP16409187U 1987-10-27 1987-10-27 Expired JPH042346Y2 (US20020125480A1-20020912-P00900.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16409187U JPH042346Y2 (US20020125480A1-20020912-P00900.png) 1987-10-27 1987-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16409187U JPH042346Y2 (US20020125480A1-20020912-P00900.png) 1987-10-27 1987-10-27

Publications (2)

Publication Number Publication Date
JPH0170042U true JPH0170042U (US20020125480A1-20020912-P00900.png) 1989-05-10
JPH042346Y2 JPH042346Y2 (US20020125480A1-20020912-P00900.png) 1992-01-27

Family

ID=31449394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16409187U Expired JPH042346Y2 (US20020125480A1-20020912-P00900.png) 1987-10-27 1987-10-27

Country Status (1)

Country Link
JP (1) JPH042346Y2 (US20020125480A1-20020912-P00900.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001007843A1 (fr) * 1999-07-26 2001-02-01 Hitachi Plant Engineering & Construction Co., Ltd. Dispositif de nettoyage d'une chambre
US6572468B1 (en) 1999-04-21 2003-06-03 Hitachi Plant Engineering & Construction Co., Ltd. Clean room device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6572468B1 (en) 1999-04-21 2003-06-03 Hitachi Plant Engineering & Construction Co., Ltd. Clean room device
WO2001007843A1 (fr) * 1999-07-26 2001-02-01 Hitachi Plant Engineering & Construction Co., Ltd. Dispositif de nettoyage d'une chambre

Also Published As

Publication number Publication date
JPH042346Y2 (US20020125480A1-20020912-P00900.png) 1992-01-27

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