JPH0170042U - - Google Patents

Info

Publication number
JPH0170042U
JPH0170042U JP1987164091U JP16409187U JPH0170042U JP H0170042 U JPH0170042 U JP H0170042U JP 1987164091 U JP1987164091 U JP 1987164091U JP 16409187 U JP16409187 U JP 16409187U JP H0170042 U JPH0170042 U JP H0170042U
Authority
JP
Japan
Prior art keywords
ceiling
blower
ceiling chamber
return port
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987164091U
Other languages
English (en)
Japanese (ja)
Other versions
JPH042346Y2 (US06534493-20030318-C00184.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16409187U priority Critical patent/JPH042346Y2/ja
Publication of JPH0170042U publication Critical patent/JPH0170042U/ja
Application granted granted Critical
Publication of JPH042346Y2 publication Critical patent/JPH042346Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP16409187U 1987-10-27 1987-10-27 Expired JPH042346Y2 (US06534493-20030318-C00184.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16409187U JPH042346Y2 (US06534493-20030318-C00184.png) 1987-10-27 1987-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16409187U JPH042346Y2 (US06534493-20030318-C00184.png) 1987-10-27 1987-10-27

Publications (2)

Publication Number Publication Date
JPH0170042U true JPH0170042U (US06534493-20030318-C00184.png) 1989-05-10
JPH042346Y2 JPH042346Y2 (US06534493-20030318-C00184.png) 1992-01-27

Family

ID=31449394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16409187U Expired JPH042346Y2 (US06534493-20030318-C00184.png) 1987-10-27 1987-10-27

Country Status (1)

Country Link
JP (1) JPH042346Y2 (US06534493-20030318-C00184.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001007843A1 (fr) * 1999-07-26 2001-02-01 Hitachi Plant Engineering & Construction Co., Ltd. Dispositif de nettoyage d'une chambre
US6572468B1 (en) 1999-04-21 2003-06-03 Hitachi Plant Engineering & Construction Co., Ltd. Clean room device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6572468B1 (en) 1999-04-21 2003-06-03 Hitachi Plant Engineering & Construction Co., Ltd. Clean room device
WO2001007843A1 (fr) * 1999-07-26 2001-02-01 Hitachi Plant Engineering & Construction Co., Ltd. Dispositif de nettoyage d'une chambre

Also Published As

Publication number Publication date
JPH042346Y2 (US06534493-20030318-C00184.png) 1992-01-27

Similar Documents

Publication Publication Date Title
JPH0170042U (US06534493-20030318-C00184.png)
JPS61132072U (US06534493-20030318-C00184.png)
JPH0191829U (US06534493-20030318-C00184.png)
JPS602745U (ja) 非層流式クリ−ンル−ム
JPS6184423U (US06534493-20030318-C00184.png)
JPH02120147U (US06534493-20030318-C00184.png)
JPS62112030U (US06534493-20030318-C00184.png)
JPS61197428U (US06534493-20030318-C00184.png)
JPH0225014U (US06534493-20030318-C00184.png)
JPH0313827U (US06534493-20030318-C00184.png)
JPS61151144U (US06534493-20030318-C00184.png)
JPS6184424U (US06534493-20030318-C00184.png)
JPS635324U (US06534493-20030318-C00184.png)
JPH02139546U (US06534493-20030318-C00184.png)
JPS61178136U (US06534493-20030318-C00184.png)
JPH01100039U (US06534493-20030318-C00184.png)
JPH01158046U (US06534493-20030318-C00184.png)
JPS61149030U (US06534493-20030318-C00184.png)
JPS6363125U (US06534493-20030318-C00184.png)
JPH0426012U (US06534493-20030318-C00184.png)
JPS62115027U (US06534493-20030318-C00184.png)
JPS62170151U (US06534493-20030318-C00184.png)
JPH01170426U (US06534493-20030318-C00184.png)
JPS6357450U (US06534493-20030318-C00184.png)
JPS6372431U (US06534493-20030318-C00184.png)