JPH0167755U - - Google Patents
Info
- Publication number
- JPH0167755U JPH0167755U JP1987163855U JP16385587U JPH0167755U JP H0167755 U JPH0167755 U JP H0167755U JP 1987163855 U JP1987163855 U JP 1987163855U JP 16385587 U JP16385587 U JP 16385587U JP H0167755 U JPH0167755 U JP H0167755U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- press
- contact part
- handling jig
- wafer handling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163855U JPH0167755U (nl) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163855U JPH0167755U (nl) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167755U true JPH0167755U (nl) | 1989-05-01 |
Family
ID=31448956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987163855U Pending JPH0167755U (nl) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167755U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991003076A1 (en) * | 1989-08-18 | 1991-03-07 | Tadahiro Ohmi | Contact member relative to electrically charged material |
-
1987
- 1987-10-26 JP JP1987163855U patent/JPH0167755U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991003076A1 (en) * | 1989-08-18 | 1991-03-07 | Tadahiro Ohmi | Contact member relative to electrically charged material |