JPH0167733U - - Google Patents
Info
- Publication number
- JPH0167733U JPH0167733U JP1987161356U JP16135687U JPH0167733U JP H0167733 U JPH0167733 U JP H0167733U JP 1987161356 U JP1987161356 U JP 1987161356U JP 16135687 U JP16135687 U JP 16135687U JP H0167733 U JPH0167733 U JP H0167733U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- light
- irradiating
- moving table
- lithography apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 4
- 238000000609 electron-beam lithography Methods 0.000 claims 3
- 239000007787 solid Substances 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161356U JPH0167733U (hr) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161356U JPH0167733U (hr) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167733U true JPH0167733U (hr) | 1989-05-01 |
Family
ID=31444218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161356U Pending JPH0167733U (hr) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167733U (hr) |
-
1987
- 1987-10-23 JP JP1987161356U patent/JPH0167733U/ja active Pending
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