JPH0166047U - - Google Patents
Info
- Publication number
- JPH0166047U JPH0166047U JP1987162355U JP16235587U JPH0166047U JP H0166047 U JPH0166047 U JP H0166047U JP 1987162355 U JP1987162355 U JP 1987162355U JP 16235587 U JP16235587 U JP 16235587U JP H0166047 U JPH0166047 U JP H0166047U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- fluid
- electrode
- microphone type
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 8
- 239000003990 capacitor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Description
第1図ないし第3図は本考案の基本的概念を説
明するためのものであつて、第1図は本考案に係
るコンデンサマイクロフオン型差圧検出器の基本
的構成図(クレーム対応図)、第2図イ〜ニは
夫々その作用説明図を示し、第3図は第1図の変
形例に係るコンデンサマイクロフオン型差圧検出
器の基本的構成図(クレーム対応図)を示して
いる。また、第4図ないし第7図は本考案の具体
的実施例を示し、第4図イは本考案に係るコンデ
ンサマイクロフオン型差圧検出器の外観斜視図、
第4図ロはその縦断側面図、第4図ハはその使用
状態を説明するための縮小縦断側面図であり、第
5図は要部(可動電極部材)の拡大斜視図であり
、第6図イはその一変形例の正面図、第6図ロは
その作用を説明するための第6図イの―線矢
視図であり、第7図イ,ロは夫々その更なる応用
例の要部拡大正面図である。更に、第8図および
第9図は、本考案の技術的背景ならびに従来技術
の問題点を説明するためのものであつて、第8図
は一般的な構成のコンデンサマイクロフオン型差
圧検出器を用いた赤外線ガス分析計を示す全体概
略構成図を示し、第9図は本考案の概念に最も関
連が深い従来構成に係るコンデンサマイクロフオ
ン型差圧検出器の縦断側面図を示している。
F1……第1圧力流体、F2……第2圧力流体
、1……可動電極、2……固定電極、S……感圧
センサー。
Figures 1 to 3 are for explaining the basic concept of the present invention, and Figure 1 is a basic configuration diagram (diagram corresponding to claims) of a condenser microphone type differential pressure detector according to the present invention. , FIGS. 2A to 2D each show an explanatory diagram of its operation, and FIG. 3 shows a basic configuration diagram (diagram corresponding to claims) of a condenser microphone type differential pressure detector according to a modification of FIG. 1. . Further, FIGS. 4 to 7 show specific embodiments of the present invention, and FIG. 4A is an external perspective view of a condenser microphone type differential pressure detector according to the present invention;
FIG. 4B is a vertical side view of the same, FIG. 4C is a reduced vertical side view for explaining its usage condition, FIG. Figure 6A is a front view of a modified example, Figure 6B is a view taken along the line - - of Figure 6A to explain its operation, and Figures 7A and 7B are respectively of further applied examples. It is an enlarged front view of the main part. Furthermore, FIGS. 8 and 9 are for explaining the technical background of the present invention and problems of the prior art, and FIG. 8 shows a condenser microphone type differential pressure detector having a general configuration. FIG. 9 shows a longitudinal cross-sectional side view of a condenser microphone type differential pressure detector having a conventional structure that is most closely related to the concept of the present invention. F1 ...first pressure fluid, F2 ...second pressure fluid, 1...movable electrode, 2...fixed electrode, S...pressure sensitive sensor.
Claims (1)
るのに用いられるコンデンサマイクロフオン型差
圧検出器であつて、 可撓性を有するダイアフラム部材から成る可動
電極が固定電極に対して適宜間隔を隔てて電気的
絶縁状態で張設されているコンデンサマイクロフ
オン型感圧センサーの機械的特性および電気的特
性が実質的に同等である2個を、互いに適宜間隔
を隔てると共にそれらの固定電極同士または可動
電極同士が対向する状態に、ひとつの直線上に位
置するように並設し、かつ、前記第1圧力流体と
第2圧力流体の一方の流体を前記各感圧センサー
における可動電極と固定電極との間の間隙内へ導
入可能に構成すると共に、他方の流体を前記各感
圧センサーにおける可動電極の外面側へ導入可能
に構成してあることを特徴とするコンデンサマイ
クロフオン型差圧検出器。[Claims for Utility Model Registration] A condenser microphone type differential pressure detector used to detect the differential pressure between a first pressure fluid and a second pressure fluid, the movable device comprising a flexible diaphragm member. Two capacitor microphone type pressure-sensitive sensors having substantially the same mechanical and electrical properties, each having an electrode stretched in an electrically insulated state at an appropriate distance from a fixed electrode, are connected to each other at appropriate intervals. The fixed electrodes or the movable electrodes are arranged in parallel so as to be spaced apart from each other and to face each other so as to be located on one straight line, and one of the first pressure fluid and the second pressure fluid is connected to the The fluid may be introduced into the gap between the movable electrode and the fixed electrode in each pressure-sensitive sensor, and the other fluid may be introduced into the outer surface of the movable electrode in each pressure-sensitive sensor. A condenser microphone type differential pressure detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987162355U JPH06744Y2 (en) | 1987-10-22 | 1987-10-22 | Condenser microphone type differential pressure detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987162355U JPH06744Y2 (en) | 1987-10-22 | 1987-10-22 | Condenser microphone type differential pressure detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0166047U true JPH0166047U (en) | 1989-04-27 |
JPH06744Y2 JPH06744Y2 (en) | 1994-01-05 |
Family
ID=31446103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987162355U Expired - Lifetime JPH06744Y2 (en) | 1987-10-22 | 1987-10-22 | Condenser microphone type differential pressure detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06744Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6037837U (en) * | 1983-08-20 | 1985-03-15 | トキコ株式会社 | Diaphragm sensor |
-
1987
- 1987-10-22 JP JP1987162355U patent/JPH06744Y2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6037837U (en) * | 1983-08-20 | 1985-03-15 | トキコ株式会社 | Diaphragm sensor |
Also Published As
Publication number | Publication date |
---|---|
JPH06744Y2 (en) | 1994-01-05 |
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