JPH0164085U - - Google Patents

Info

Publication number
JPH0164085U
JPH0164085U JP1987158311U JP15831187U JPH0164085U JP H0164085 U JPH0164085 U JP H0164085U JP 1987158311 U JP1987158311 U JP 1987158311U JP 15831187 U JP15831187 U JP 15831187U JP H0164085 U JPH0164085 U JP H0164085U
Authority
JP
Japan
Prior art keywords
detection sensor
optical systems
position detection
target
shutters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987158311U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987158311U priority Critical patent/JPH0164085U/ja
Publication of JPH0164085U publication Critical patent/JPH0164085U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1987158311U 1987-10-16 1987-10-16 Pending JPH0164085U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987158311U JPH0164085U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987158311U JPH0164085U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Publications (1)

Publication Number Publication Date
JPH0164085U true JPH0164085U (enrdf_load_stackoverflow) 1989-04-25

Family

ID=31438521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987158311U Pending JPH0164085U (enrdf_load_stackoverflow) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0164085U (enrdf_load_stackoverflow)

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