JPH0164007U - - Google Patents

Info

Publication number
JPH0164007U
JPH0164007U JP1987159569U JP15956987U JPH0164007U JP H0164007 U JPH0164007 U JP H0164007U JP 1987159569 U JP1987159569 U JP 1987159569U JP 15956987 U JP15956987 U JP 15956987U JP H0164007 U JPH0164007 U JP H0164007U
Authority
JP
Japan
Prior art keywords
target sheet
measuring device
displacement measuring
optical displacement
microcube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987159569U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543366Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15956987U priority Critical patent/JPH0543366Y2/ja
Publication of JPH0164007U publication Critical patent/JPH0164007U/ja
Application granted granted Critical
Publication of JPH0543366Y2 publication Critical patent/JPH0543366Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP15956987U 1987-10-19 1987-10-19 Expired - Lifetime JPH0543366Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15956987U JPH0543366Y2 (en, 2012) 1987-10-19 1987-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15956987U JPH0543366Y2 (en, 2012) 1987-10-19 1987-10-19

Publications (2)

Publication Number Publication Date
JPH0164007U true JPH0164007U (en, 2012) 1989-04-25
JPH0543366Y2 JPH0543366Y2 (en, 2012) 1993-11-01

Family

ID=31440898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15956987U Expired - Lifetime JPH0543366Y2 (en, 2012) 1987-10-19 1987-10-19

Country Status (1)

Country Link
JP (1) JPH0543366Y2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5373986B1 (ja) * 2013-02-15 2013-12-18 株式会社Ihi 不陸寸法計測方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5373986B1 (ja) * 2013-02-15 2013-12-18 株式会社Ihi 不陸寸法計測方法及び装置

Also Published As

Publication number Publication date
JPH0543366Y2 (en, 2012) 1993-11-01

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