JPH0164007U - - Google Patents

Info

Publication number
JPH0164007U
JPH0164007U JP1987159569U JP15956987U JPH0164007U JP H0164007 U JPH0164007 U JP H0164007U JP 1987159569 U JP1987159569 U JP 1987159569U JP 15956987 U JP15956987 U JP 15956987U JP H0164007 U JPH0164007 U JP H0164007U
Authority
JP
Japan
Prior art keywords
target sheet
measuring device
displacement measuring
optical displacement
microcube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987159569U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543366Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15956987U priority Critical patent/JPH0543366Y2/ja
Publication of JPH0164007U publication Critical patent/JPH0164007U/ja
Application granted granted Critical
Publication of JPH0543366Y2 publication Critical patent/JPH0543366Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP15956987U 1987-10-19 1987-10-19 Expired - Lifetime JPH0543366Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15956987U JPH0543366Y2 (enrdf_load_stackoverflow) 1987-10-19 1987-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15956987U JPH0543366Y2 (enrdf_load_stackoverflow) 1987-10-19 1987-10-19

Publications (2)

Publication Number Publication Date
JPH0164007U true JPH0164007U (enrdf_load_stackoverflow) 1989-04-25
JPH0543366Y2 JPH0543366Y2 (enrdf_load_stackoverflow) 1993-11-01

Family

ID=31440898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15956987U Expired - Lifetime JPH0543366Y2 (enrdf_load_stackoverflow) 1987-10-19 1987-10-19

Country Status (1)

Country Link
JP (1) JPH0543366Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5373986B1 (ja) * 2013-02-15 2013-12-18 株式会社Ｉｈｉ 不陸寸法計測方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5373986B1 (ja) * 2013-02-15 2013-12-18 株式会社Ｉｈｉ 不陸寸法計測方法及び装置

Also Published As

Publication number Publication date
JPH0543366Y2 (enrdf_load_stackoverflow) 1993-11-01

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