JPH0163130U - - Google Patents
Info
- Publication number
- JPH0163130U JPH0163130U JP1987159046U JP15904687U JPH0163130U JP H0163130 U JPH0163130 U JP H0163130U JP 1987159046 U JP1987159046 U JP 1987159046U JP 15904687 U JP15904687 U JP 15904687U JP H0163130 U JPH0163130 U JP H0163130U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- transfer device
- gripping claw
- view
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159046U JPH0163130U (me) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159046U JPH0163130U (me) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163130U true JPH0163130U (me) | 1989-04-24 |
Family
ID=31439910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159046U Pending JPH0163130U (me) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163130U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0250955U (me) * | 1988-10-03 | 1990-04-10 |
-
1987
- 1987-10-16 JP JP1987159046U patent/JPH0163130U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0250955U (me) * | 1988-10-03 | 1990-04-10 |