JPH0161471U - - Google Patents

Info

Publication number
JPH0161471U
JPH0161471U JP15608987U JP15608987U JPH0161471U JP H0161471 U JPH0161471 U JP H0161471U JP 15608987 U JP15608987 U JP 15608987U JP 15608987 U JP15608987 U JP 15608987U JP H0161471 U JPH0161471 U JP H0161471U
Authority
JP
Japan
Prior art keywords
cycle
refrigerator
cryopump
pump case
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15608987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15608987U priority Critical patent/JPH0161471U/ja
Publication of JPH0161471U publication Critical patent/JPH0161471U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP15608987U 1987-10-14 1987-10-14 Pending JPH0161471U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15608987U JPH0161471U (OSRAM) 1987-10-14 1987-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15608987U JPH0161471U (OSRAM) 1987-10-14 1987-10-14

Publications (1)

Publication Number Publication Date
JPH0161471U true JPH0161471U (OSRAM) 1989-04-19

Family

ID=31434304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15608987U Pending JPH0161471U (OSRAM) 1987-10-14 1987-10-14

Country Status (1)

Country Link
JP (1) JPH0161471U (OSRAM)

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