JPH0160530U - - Google Patents
Info
- Publication number
- JPH0160530U JPH0160530U JP15610987U JP15610987U JPH0160530U JP H0160530 U JPH0160530 U JP H0160530U JP 15610987 U JP15610987 U JP 15610987U JP 15610987 U JP15610987 U JP 15610987U JP H0160530 U JPH0160530 U JP H0160530U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- resist coating
- rotatable stage
- resist
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15610987U JPH0160530U (xx) | 1987-10-14 | 1987-10-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15610987U JPH0160530U (xx) | 1987-10-14 | 1987-10-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0160530U true JPH0160530U (xx) | 1989-04-17 |
Family
ID=31434343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15610987U Pending JPH0160530U (xx) | 1987-10-14 | 1987-10-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0160530U (xx) |
-
1987
- 1987-10-14 JP JP15610987U patent/JPH0160530U/ja active Pending