JPH0159838U - - Google Patents
Info
- Publication number
- JPH0159838U JPH0159838U JP15552087U JP15552087U JPH0159838U JP H0159838 U JPH0159838 U JP H0159838U JP 15552087 U JP15552087 U JP 15552087U JP 15552087 U JP15552087 U JP 15552087U JP H0159838 U JPH0159838 U JP H0159838U
- Authority
- JP
- Japan
- Prior art keywords
- region
- insulating substrate
- load sensor
- capacitive load
- fixed electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 4
- 239000003990 capacitor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155520U JPH0743625Y2 (ja) | 1987-10-13 | 1987-10-13 | 静電容量式荷重センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155520U JPH0743625Y2 (ja) | 1987-10-13 | 1987-10-13 | 静電容量式荷重センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0159838U true JPH0159838U (de) | 1989-04-14 |
| JPH0743625Y2 JPH0743625Y2 (ja) | 1995-10-09 |
Family
ID=31433220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987155520U Expired - Lifetime JPH0743625Y2 (ja) | 1987-10-13 | 1987-10-13 | 静電容量式荷重センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0743625Y2 (de) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02236858A (ja) * | 1989-03-10 | 1990-09-19 | Hitachi Ltd | 蓋装置 |
| JPH02281113A (ja) * | 1989-04-24 | 1990-11-16 | Matsushita Electric Ind Co Ltd | 重量センサ素子 |
| JPH041306U (de) * | 1990-04-19 | 1992-01-08 | ||
| JPH0470904U (de) * | 1990-10-31 | 1992-06-23 | ||
| JPH0727596A (ja) * | 1993-07-08 | 1995-01-27 | Matsushita Electric Ind Co Ltd | 静電容量型重量センサ素子およびその製造法 |
| JPH07210310A (ja) * | 1994-01-19 | 1995-08-11 | Nitta Ind Corp | 静電容量式センサー |
| JPH07280683A (ja) * | 1994-04-07 | 1995-10-27 | Nitta Ind Corp | 圧力センサー |
| JPH11211586A (ja) * | 1998-01-27 | 1999-08-06 | Matsushita Electric Works Ltd | 半導体装置 |
| WO2003010651A1 (fr) * | 2001-07-27 | 2003-02-06 | Elantech Devices Corporation | Appareil de saisie et son procede de fabrication |
| WO2007138829A1 (ja) * | 2006-05-25 | 2007-12-06 | Omron Corporation | 静電容量式センサ |
| JP2019090731A (ja) * | 2017-11-15 | 2019-06-13 | オムロン株式会社 | 静電容量式圧力センサ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5578228A (en) * | 1978-12-01 | 1980-06-12 | Besco Ind Inc | Power responsive motion transducer |
| JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
-
1987
- 1987-10-13 JP JP1987155520U patent/JPH0743625Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5578228A (en) * | 1978-12-01 | 1980-06-12 | Besco Ind Inc | Power responsive motion transducer |
| JPS5654331A (en) * | 1979-09-21 | 1981-05-14 | Bosch Gmbh Robert | Volumetric pressure sensor |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02236858A (ja) * | 1989-03-10 | 1990-09-19 | Hitachi Ltd | 蓋装置 |
| JPH02281113A (ja) * | 1989-04-24 | 1990-11-16 | Matsushita Electric Ind Co Ltd | 重量センサ素子 |
| JPH041306U (de) * | 1990-04-19 | 1992-01-08 | ||
| JPH0470904U (de) * | 1990-10-31 | 1992-06-23 | ||
| JPH0727596A (ja) * | 1993-07-08 | 1995-01-27 | Matsushita Electric Ind Co Ltd | 静電容量型重量センサ素子およびその製造法 |
| JPH07210310A (ja) * | 1994-01-19 | 1995-08-11 | Nitta Ind Corp | 静電容量式センサー |
| JPH07280683A (ja) * | 1994-04-07 | 1995-10-27 | Nitta Ind Corp | 圧力センサー |
| JPH11211586A (ja) * | 1998-01-27 | 1999-08-06 | Matsushita Electric Works Ltd | 半導体装置 |
| WO2003010651A1 (fr) * | 2001-07-27 | 2003-02-06 | Elantech Devices Corporation | Appareil de saisie et son procede de fabrication |
| WO2007138829A1 (ja) * | 2006-05-25 | 2007-12-06 | Omron Corporation | 静電容量式センサ |
| JP2019090731A (ja) * | 2017-11-15 | 2019-06-13 | オムロン株式会社 | 静電容量式圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743625Y2 (ja) | 1995-10-09 |