JPH0158968U - - Google Patents
Info
- Publication number
- JPH0158968U JPH0158968U JP15432287U JP15432287U JPH0158968U JP H0158968 U JPH0158968 U JP H0158968U JP 15432287 U JP15432287 U JP 15432287U JP 15432287 U JP15432287 U JP 15432287U JP H0158968 U JPH0158968 U JP H0158968U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- medium
- gas
- excimer
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005284 excitation Effects 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987154322U JPH0731554Y2 (ja) | 1987-10-08 | 1987-10-08 | エキシマレーザ発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987154322U JPH0731554Y2 (ja) | 1987-10-08 | 1987-10-08 | エキシマレーザ発振器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0158968U true JPH0158968U (zh) | 1989-04-13 |
| JPH0731554Y2 JPH0731554Y2 (ja) | 1995-07-19 |
Family
ID=31430949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987154322U Expired - Lifetime JPH0731554Y2 (ja) | 1987-10-08 | 1987-10-08 | エキシマレーザ発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731554Y2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002198603A (ja) * | 2001-12-11 | 2002-07-12 | Cymer Inc | エキシマレーザ用のガス補充の方法と装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048267U (ja) * | 1983-09-09 | 1985-04-04 | 日本電気株式会社 | 炭酸ガスレ−ザ用ガス混合装置 |
-
1987
- 1987-10-08 JP JP1987154322U patent/JPH0731554Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6048267U (ja) * | 1983-09-09 | 1985-04-04 | 日本電気株式会社 | 炭酸ガスレ−ザ用ガス混合装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002198603A (ja) * | 2001-12-11 | 2002-07-12 | Cymer Inc | エキシマレーザ用のガス補充の方法と装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731554Y2 (ja) | 1995-07-19 |