JPH0158929U - - Google Patents

Info

Publication number
JPH0158929U
JPH0158929U JP15454887U JP15454887U JPH0158929U JP H0158929 U JPH0158929 U JP H0158929U JP 15454887 U JP15454887 U JP 15454887U JP 15454887 U JP15454887 U JP 15454887U JP H0158929 U JPH0158929 U JP H0158929U
Authority
JP
Japan
Prior art keywords
counterbore
susceptor
wafer
straight line
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15454887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15454887U priority Critical patent/JPH0158929U/ja
Publication of JPH0158929U publication Critical patent/JPH0158929U/ja
Pending legal-status Critical Current

Links

JP15454887U 1987-10-08 1987-10-08 Pending JPH0158929U (US08124630-20120228-C00152.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15454887U JPH0158929U (US08124630-20120228-C00152.png) 1987-10-08 1987-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15454887U JPH0158929U (US08124630-20120228-C00152.png) 1987-10-08 1987-10-08

Publications (1)

Publication Number Publication Date
JPH0158929U true JPH0158929U (US08124630-20120228-C00152.png) 1989-04-13

Family

ID=31431375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15454887U Pending JPH0158929U (US08124630-20120228-C00152.png) 1987-10-08 1987-10-08

Country Status (1)

Country Link
JP (1) JPH0158929U (US08124630-20120228-C00152.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006137632A (ja) * 2004-11-11 2006-06-01 Shin Etsu Handotai Co Ltd シリコンエピタキシャルウェーハの製造方法及びシリコンエピタキシャルウェーハ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006137632A (ja) * 2004-11-11 2006-06-01 Shin Etsu Handotai Co Ltd シリコンエピタキシャルウェーハの製造方法及びシリコンエピタキシャルウェーハ
JP4670317B2 (ja) * 2004-11-11 2011-04-13 信越半導体株式会社 シリコンエピタキシャルウェーハの製造方法

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