JPH0158664U - - Google Patents
Info
- Publication number
- JPH0158664U JPH0158664U JP15366787U JP15366787U JPH0158664U JP H0158664 U JPH0158664 U JP H0158664U JP 15366787 U JP15366787 U JP 15366787U JP 15366787 U JP15366787 U JP 15366787U JP H0158664 U JPH0158664 U JP H0158664U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- sealing device
- thin film
- processed
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
- 239000002783 friction material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15366787U JPH0158664U (en, 2012) | 1987-10-07 | 1987-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15366787U JPH0158664U (en, 2012) | 1987-10-07 | 1987-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158664U true JPH0158664U (en, 2012) | 1989-04-12 |
Family
ID=31429715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15366787U Pending JPH0158664U (en, 2012) | 1987-10-07 | 1987-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158664U (en, 2012) |
-
1987
- 1987-10-07 JP JP15366787U patent/JPH0158664U/ja active Pending
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