JPH0158662U - - Google Patents

Info

Publication number
JPH0158662U
JPH0158662U JP15152587U JP15152587U JPH0158662U JP H0158662 U JPH0158662 U JP H0158662U JP 15152587 U JP15152587 U JP 15152587U JP 15152587 U JP15152587 U JP 15152587U JP H0158662 U JPH0158662 U JP H0158662U
Authority
JP
Japan
Prior art keywords
vapor deposition
sputtering
sample
degrees
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15152587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15152587U priority Critical patent/JPH0158662U/ja
Publication of JPH0158662U publication Critical patent/JPH0158662U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15152587U 1987-10-02 1987-10-02 Pending JPH0158662U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15152587U JPH0158662U (enrdf_load_stackoverflow) 1987-10-02 1987-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15152587U JPH0158662U (enrdf_load_stackoverflow) 1987-10-02 1987-10-02

Publications (1)

Publication Number Publication Date
JPH0158662U true JPH0158662U (enrdf_load_stackoverflow) 1989-04-12

Family

ID=31425647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15152587U Pending JPH0158662U (enrdf_load_stackoverflow) 1987-10-02 1987-10-02

Country Status (1)

Country Link
JP (1) JPH0158662U (enrdf_load_stackoverflow)

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