JPH0158662U - - Google Patents
Info
- Publication number
- JPH0158662U JPH0158662U JP15152587U JP15152587U JPH0158662U JP H0158662 U JPH0158662 U JP H0158662U JP 15152587 U JP15152587 U JP 15152587U JP 15152587 U JP15152587 U JP 15152587U JP H0158662 U JPH0158662 U JP H0158662U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- sputtering
- sample
- degrees
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims 3
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15152587U JPH0158662U (cs) | 1987-10-02 | 1987-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15152587U JPH0158662U (cs) | 1987-10-02 | 1987-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158662U true JPH0158662U (cs) | 1989-04-12 |
Family
ID=31425647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15152587U Pending JPH0158662U (cs) | 1987-10-02 | 1987-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158662U (cs) |
-
1987
- 1987-10-02 JP JP15152587U patent/JPH0158662U/ja active Pending
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