JPH0158110U - - Google Patents
Info
- Publication number
- JPH0158110U JPH0158110U JP15416087U JP15416087U JPH0158110U JP H0158110 U JPH0158110 U JP H0158110U JP 15416087 U JP15416087 U JP 15416087U JP 15416087 U JP15416087 U JP 15416087U JP H0158110 U JPH0158110 U JP H0158110U
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- thin film
- substrate
- distance
- instrument
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15416087U JPH0158110U (US06566495-20030520-M00011.png) | 1987-10-07 | 1987-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15416087U JPH0158110U (US06566495-20030520-M00011.png) | 1987-10-07 | 1987-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158110U true JPH0158110U (US06566495-20030520-M00011.png) | 1989-04-11 |
Family
ID=31430644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15416087U Pending JPH0158110U (US06566495-20030520-M00011.png) | 1987-10-07 | 1987-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158110U (US06566495-20030520-M00011.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006511801A (ja) * | 2002-12-23 | 2006-04-06 | ラム リサーチ コーポレーション | 相補的なセンサを用いた測定処理制御のための方法および装置 |
| JP2008304471A (ja) * | 2000-03-28 | 2008-12-18 | Toshiba Corp | 膜厚測定装置、膜厚測定方法および記録媒体 |
| JP2019507884A (ja) * | 2016-03-11 | 2019-03-22 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ | 傾き耐性のある距離センサ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60114709A (ja) * | 1983-11-28 | 1985-06-21 | Yokohama Rubber Co Ltd:The | 絶縁物の厚み測定装置 |
| JPS61254812A (ja) * | 1985-05-08 | 1986-11-12 | Meisan Kk | 非磁性体シ−ト厚さ連続測定装置 |
| JPS627012B2 (US06566495-20030520-M00011.png) * | 1981-12-21 | 1987-02-14 | Nissan Motor |
-
1987
- 1987-10-07 JP JP15416087U patent/JPH0158110U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS627012B2 (US06566495-20030520-M00011.png) * | 1981-12-21 | 1987-02-14 | Nissan Motor | |
| JPS60114709A (ja) * | 1983-11-28 | 1985-06-21 | Yokohama Rubber Co Ltd:The | 絶縁物の厚み測定装置 |
| JPS61254812A (ja) * | 1985-05-08 | 1986-11-12 | Meisan Kk | 非磁性体シ−ト厚さ連続測定装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008304471A (ja) * | 2000-03-28 | 2008-12-18 | Toshiba Corp | 膜厚測定装置、膜厚測定方法および記録媒体 |
| JP2006511801A (ja) * | 2002-12-23 | 2006-04-06 | ラム リサーチ コーポレーション | 相補的なセンサを用いた測定処理制御のための方法および装置 |
| JP2019507884A (ja) * | 2016-03-11 | 2019-03-22 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ | 傾き耐性のある距離センサ |
| US11118940B2 (en) | 2016-03-11 | 2021-09-14 | Robert Bosch Gmbh | Tilt-tolerant displacement sensor |
