JPH01316164A - Manufacture of cut product and wire saw machine - Google Patents

Abstract

PURPOSE:To check the scratching of cut faces of a work piece, which occurs when a wire is pulled out, and enhance the profile irregularity by taking out the wire from the work piece in a way to pull it out after the work piece was washed with rinsing oil having a temperature over 30 deg.C. CONSTITUTION:Cutting is performed by sliding a line of processing wire 3 along the direction of the wire and supplying abrasive liquid to a work piece 1 and the sliding part of the wire 3. Next, the rinsing oil 5 inside a rinsing oil tank 20 is maintained over 30 deg.C by a temperature adjusting mechanism consisting of an electric heater 23 and a temperature sensor 25. After washing the work piece 1 with the rinsing oil, the wire 3 is removed from the work piece 1 in a way to pull it out. As a result, the scratching of cut faces of the work piece 1, which occurs on the extraction of the wire 3, can be checked to improve its profile irregularity.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for manufacturing cutting products, such as cutting out wafers from silicon ingots or grooving brittle materials, and a wire saw used in the manufacturing method. Regarding machines.

[Conventional technology]

Conventionally, when cutting a workpiece using a wire saw machine, in order to wash away dirt such as abrasive grains attached to the cut end of the workpiece, the wire is cut into the workpiece after the machining is completed. The product was obtained by spraying cleaning oil on the wire in a shower and then removing the wire by pulling it out.

Alternatively, the wires were removed from the workpiece by cutting all the wires of the cutting head after the cutting process was completed.

[Problems to be solved by the invention] However, the abrasive grains supplied to the workpiece strongly adhere to the cut edge, and the width of the cut edge is narrow (usually 150 to 300 mm).
Even if the washing oil was sprayed in a shower-like manner, it could not be completely washed away.

If the wire is pulled out from the workpiece with abrasive grains still attached to the cut end, the cut surface of the cut end will be scratched, resulting in a defective product. This occurs because the wire threading performed during wire drawing involves residual abrasive grains at the cut end, resulting in secondary cutting.

In addition, the abrasive grains stuck to the cut edges cannot be sufficiently removed even if the cleaning time is extended, and even when cleaning with a jet spray, the narrow cut edges are a problem and the abrasive grains cannot be sufficiently washed away.

In order to obtain a product by cutting all the wires in the cutting head, the wire must be wound around the rollers of the cutting head and re-tightened each time the cutting process is performed, which requires a great deal of time and effort. . Furthermore, since the cut surface is not sufficiently cleaned after cutting, there is also the problem that it takes time to clean the product after it has been taken out.

The present invention is capable of suppressing eaves on the cut surface of a workpiece that occurs during wire drawing, improving surface accuracy, shortening working time, and increasing the effect of primary cleaning after cutting. The object of the present invention is to provide a method for manufacturing cutting products and a wire saw machine that can simplify subsequent cleaning.

[Means for Solving the Problems] The present invention provides a method of cleaning a workpiece with oil at 30° C. or higher, and then removing the wire by pulling it out.
The first point is the manufacturing method of cutting products. Further, as shown in FIG. 1, the second aspect is a wire saw machine in which the cleaning oil supply system includes a temperature adjustment mechanism that maintains the cleaning oil at a predetermined temperature.

The basis for setting the washing oil temperature at 30°C or higher in the method of the present invention is based on the results of observing the surface of the product after slicing with various washing oil temperatures as shown in Figure 2. It is thought that this is because the viscosity of the lapping oil in the abrasive grains decreases when the temperature exceeds .degree. C., making it easier for the residual abrasive grains to flow.

Note that the surface observation of the sliced product shown in FIG. 2 is as follows.

A silicon ingot with a cross section of 100mm square was used as the workpiece, a piano wire with a diameter of 0.18m+s was used as the wire, and a mixture of SiC"1000 abrasive grains and lapping oil was used as the abrasive liquid. Simultaneous slicing was performed.

After performing the slicing method under the above conditions, the wrapping oil was used as a cleaning oil, and shower cleaning was performed for 40 minutes while adjusting the temperature to a predetermined temperature. Afterwards, remove the wire from the workpiece while performing shower cleaning.
The surface observation was performed by observing the surface of the workpiece that had been pulled out and sliced at a rate of mm/min.The surface observation was performed by visually determining the presence of eaves on the workpiece and the residual state of abrasive grains when the wire was pulled out. The graph shown in Figure 2 is the determination result, and the data are the results of five experiments under the same conditions.

[For production]

The method for producing cutting products and the wire saw machine of the present invention can remove the wire by cleaning the workpiece after cutting with washing oil at 30°C or higher, so that the wire saw machine can remove the wire after cutting. The cleaning effect can be enhanced. Therefore, it is possible to suppress the eaves on the cut surface of the workpiece that occurs during wire drawing, improve the surface accuracy, and reduce the time spent on cleaning, thereby shortening the overall work time. Furthermore, subsequent cleaning can be simplified and time and effort can be saved.

〔Example〕

FIG. 1 shows an embodiment of the wire saw machine of the present invention.
As shown in the figure, a cutting rod 30 is installed in the processing chamber 10, and the cutting wire 3 is wrapped around the three rollers 4' and 4.4 at the vertices of a triangle in a large number. By doing so, processing wire rows are formed. A machining table 8 that can be raised and lowered is installed below the cutting blade 30 on which the workpiece 1 is placed and fixed. In the figure, 80 indicates a part of the elevating means. Above the workpiece 1 are an abrasive grain nozzle (not shown) that supplies abrasive grains to the workpiece 1 and a cleaning oil nozzle 5 of a cleaning oil supply system that supplies cleaning oil 5.
0,50.50 are provided. Although not shown, the cutting blade 30 has a function of connecting its single roller 4' with a reciprocating motion imparting means to slide the machining wire array relative to the workpiece 1 in the direction along the wire. Further, the processing chamber 10 is provided with a cleaning oil recovery port 11 at the lower part.

The washing oil supply system includes, in addition to the washing oil nozzles 50, 50.50 installed in the processing chamber 10, a tank 20 provided outside the processing chamber 10, and a tank 20 and washing oil nozzle 50 or washing oil recovery on the processing room side. An outbound pipe 21 and a return pipe 2 connecting to the port 11
It is equipped with 2. Furthermore, inside the washing oil tank 20, an electric heater 23 and a temperature sensor 25 are provided as means for heating the washing oil 5.
It is equipped with a temperature control mechanism consisting of:

This temperature control i side is set to maintain the temperature of the washing oil 5 at 30°C or higher, and the temperature control is controlled by the tank 2.
A temperature sensor 25 immersed in the cleaning oil 5 in the temperature sensor 25 detects the temperature of the cleaning oil and sends an opening/closing signal to a solenoid valve (not shown) that opens and closes the heater 23. In other words, if the washing oil temperature is lower than a certain temperature (for example, 45°C), the heater 2
The solenoid valve 3 is opened and current is passed through the heater 23 to heat the cleaning oil 5. On the other hand, when the wash oil temperature is higher than a certain temperature, the solenoid valve of the heater 23 is closed and the wash oil 5 is cooled. Using this example wire saw machine, a constant temperature of 45% was obtained after cutting.
After performing oil cleaning with cleaning oil 5 in C, and continuing to perform shower cleaning at the same temperature, the processing table 8 was lowered and the wire 3 was pulled out from the workpiece using JIAvAL. No good quality cutting products were obtained.

Next, the cleaning oil 5 is supplied into the processing chamber 10, and the processing chamber l
The mechanism for returning from O to inside the tank 20 will be explained. As shown in FIG. 1, the tank 20 is equipped with a pump 29, and the oil is sent through the outgoing pipe 21 to the washing nozzles 50, 50, 50. On the other hand, the cleaning oil 5' recovered from the recovery port ll in the processing chamber IO passes through the return pipe 22 and returns into the tank 20 through the recovery port 26 in the tank 20. The tank 20 is provided with a stirring blade 27 that stirs the cleaning oil 5 for the purpose of uniformizing the cleaning oil temperature, and this stirring blade 12'
? is driven by the motor 28.

The washing oil temperature set in the present invention is not limited to the above embodiment (it may be 30° C. or higher).

The workpiece used in the present invention is not limited to silicon, but is any material that can be cut with a wire saw.

The cleaning oil used in the present invention is not limited to wrapping oil, but other oils such as kerosene can also be used to obtain the same effects as in the examples.

The washing oil heating means used in the wire saw machine of the present invention is not limited to the electric heater as in the embodiment. For example, hot water, hot oil, and other fluids such as those mentioned above are also possible.

[Effects of the Invention] According to the method for producing a cutting product and the wire saw machine of the present invention, the workpiece after cutting can be cleaned with oil at 30°C or higher, and then the wire can be removed by pulling it out. Therefore, due to the high primary cleaning effect after cutting, it is possible to suppress flaws on the cut surface of the workpiece that occur during wire drawing and improve the surface area. Moreover, since the time spent on cleaning can be shortened, the overall work time can be shortened. Moreover, subsequent cleaning can be simplified and time and effort can be saved.

[Brief explanation of the drawing]

FIG. 1 is a model diagram showing an embodiment of the wire saw machine of the present invention, and FIG. 2 is a graph for explaining the present invention in detail. In the figure, l: workpiece, 3: wire, 4: roller, 5,
5': Oil cleaning, 8: Processing table, 23: Electric heater, 25: Temperature sensor, 30: Cutting head, 50: Oil cleaning nozzle.

Claims (1)

[Claims] 1. A processing wire row made by winding a large number of cutting wires around a workpiece in the same manner between a plurality of rollers is slid in a direction along the wire, and the sliding of the workpiece and the wire is performed. In the manufacturing method of cutting products, in which cutting is performed by supplying an abrasive liquid to the moving parts, the wire is removed from the workpiece after oil cleaning, and the product is obtained. A method for manufacturing a cutting product characterized by removing the wire from the workpiece after cleaning. 2. A cutting head in which a cutting wire is wound many times between a plurality of rollers to form a processing wire row, a processing table that is installed below the cutting head and can be raised and lowered to place and fix the workpiece, and a workpiece and An abrasive liquid supply system that supplies abrasive liquid to the sliding contact portion of the wire, a cleaning oil supply system that supplies cleaning oil to the workpiece after cutting, and a cleaning oil supply system that supplies the processing wire row of the cutting head with sliding in the wire parallel direction. What is claimed is: 1. A wire saw machine equipped with means for imparting reciprocating motion to perform reciprocating motion, characterized in that the cleaning oil supply system is equipped with a temperature adjustment mechanism that maintains the cleaning oil at a predetermined temperature.