JPH0130393B2 - - Google Patents

Info

Publication number
JPH0130393B2
JPH0130393B2 JP60237841A JP23784185A JPH0130393B2 JP H0130393 B2 JPH0130393 B2 JP H0130393B2 JP 60237841 A JP60237841 A JP 60237841A JP 23784185 A JP23784185 A JP 23784185A JP H0130393 B2 JPH0130393 B2 JP H0130393B2
Authority
JP
Japan
Prior art keywords
case
piezoelectric
movable
actuator device
piezoelectric film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60237841A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6298523A (ja
Inventor
Masashi Mukogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujisoku Corp
Original Assignee
Fujisoku Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujisoku Electric Co Ltd filed Critical Fujisoku Electric Co Ltd
Priority to JP60237841A priority Critical patent/JPS6298523A/ja
Publication of JPS6298523A publication Critical patent/JPS6298523A/ja
Publication of JPH0130393B2 publication Critical patent/JPH0130393B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP60237841A 1985-10-24 1985-10-24 圧電アクチユエ−タ装置 Granted JPS6298523A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60237841A JPS6298523A (ja) 1985-10-24 1985-10-24 圧電アクチユエ−タ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237841A JPS6298523A (ja) 1985-10-24 1985-10-24 圧電アクチユエ−タ装置

Publications (2)

Publication Number Publication Date
JPS6298523A JPS6298523A (ja) 1987-05-08
JPH0130393B2 true JPH0130393B2 (enrdf_load_html_response) 1989-06-19

Family

ID=17021203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60237841A Granted JPS6298523A (ja) 1985-10-24 1985-10-24 圧電アクチユエ−タ装置

Country Status (1)

Country Link
JP (1) JPS6298523A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025053264A1 (ja) * 2023-09-08 2025-03-13 Ａｇｃ株式会社 ガラス振動板およびガラスモジュール

Also Published As

Publication number Publication date
JPS6298523A (ja) 1987-05-08

Similar Documents

Publication Publication Date Title
KR20170054432A (ko) 큰 힘과 편향을 구현하기 위한 마이크로기계 압전 액추에이터
JP2004516783A (ja) 静電装置
US6291928B1 (en) High bandwidth, large stroke actuator
EP0993055A3 (en) Piezoelectric actuator and electronic apparatus with piezoelectric actuator
EP0963033A4 (en) ACTUATOR AND EQUIPPED WATCH AND ERROR DETECTOR
JPWO2008102553A1 (ja) 駆動装置
JP2009077502A (ja) タッチスイッチの触覚反力装置
JPH0346704B2 (enrdf_load_html_response)
JPH0130393B2 (enrdf_load_html_response)
JP3624635B2 (ja) 積層型アクチュエータおよび移動装置
JPH0455355B2 (enrdf_load_html_response)
JPS6230769Y2 (enrdf_load_html_response)
JP2960112B2 (ja) 微小変位装置
JPS60245481A (ja) 圧電型アクチュエータ
JPH0746908B2 (ja) 位置決め装置
US20050145606A1 (en) Low cost actuator with 2 dimensional motion
JPS61147405U (enrdf_load_html_response)
JPH0610338Y2 (ja) 光スキヤナ−
JPS63693U (enrdf_load_html_response)
JPS60257776A (ja) 電歪駆動素子
Fang et al. Non-linear Behavior of pMUT for High Sound Pressure Generation
JPS58213484A (ja) 差動型変位発生機構
JPS638713Y2 (enrdf_load_html_response)
JPH1141953A (ja) 電気機械変換素子を利用した駆動装置
JPH0313619U (enrdf_load_html_response)