JPH01297537A - Inspecting device for pump cam surface of cam shaft - Google Patents

Inspecting device for pump cam surface of cam shaft

Info

Publication number
JPH01297537A
JPH01297537A JP12787988A JP12787988A JPH01297537A JP H01297537 A JPH01297537 A JP H01297537A JP 12787988 A JP12787988 A JP 12787988A JP 12787988 A JP12787988 A JP 12787988A JP H01297537 A JPH01297537 A JP H01297537A
Authority
JP
Japan
Prior art keywords
cam
window
image
pump
pump cam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12787988A
Other languages
Japanese (ja)
Other versions
JPH0619332B2 (en
Inventor
Fumiaki Fukunaga
福永 文昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihatsu Motor Co Ltd
Original Assignee
Daihatsu Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihatsu Motor Co Ltd filed Critical Daihatsu Motor Co Ltd
Priority to JP12787988A priority Critical patent/JPH0619332B2/en
Publication of JPH01297537A publication Critical patent/JPH01297537A/en
Publication of JPH0619332B2 publication Critical patent/JPH0619332B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515Objects of complex shape, e.g. examined with use of a surface follower device

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To exactly detect 'sagging' caused by TIG hardening by calculating a pump cam position from a base circle part of an image, determining a window position and executing an inspection of a defect with regard to the inside of the window. CONSTITUTION:A processing means 4 drives a shaft holding means 2, brings a pump cam P and an intake cam I to image pickup simultaneously by a camera means 3, and the first image containing a part of a base circle part Ib of the cam I is obtained. In an end edge If of this circle part Ib, 'sagging' is not generated. Subsequently, the means 4 compares light and darkness on the X axis of the first image and a prescribed threshold value, and detects a position X3 of the cam I. Next, the means 4 calculates a window, based on distance constants (a), (b) of the cam P and the cam I which have been set in advance, and sets a window W. Also, a cam shaft S is rotated by the means 2, and while converting a pump cam surface Pc to an image by the means 3, an inspection of a defect in the window W is executed. In such a way, 'sagging' of an end edge Pd can be detected exactly.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本Q明は、カムシャフトのポンプカム面検査装置に関し
、更に詳しくは、TIG焼入れ処理を行ったカムシャフ
トに対しても好適にポンプカム面の検査を行うことがで
きる検査装置に関する。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a pump cam surface inspection device for camshafts, and more specifically, it is suitable for inspecting pump cam surfaces even for camshafts that have been subjected to TIG hardening treatment. The present invention relates to an inspection device capable of performing.

〔従来の技術〕[Conventional technology]

カムシャフトのポンプカム面検査装置の一般的構成は、
第1図に示すように、カムシャフトSを所定の位置、角
度に保持するシャフト保持手段2と、カムシャフトSの
画像を得るカメラ手段3と、前記シャフト保持手段2及
びカメラ手段3を制御してカムシャフトSのポンプカム
面の検査を行う処理袋W14とからなっている。
The general configuration of a camshaft pump cam surface inspection device is as follows:
As shown in FIG. 1, a shaft holding means 2 that holds the camshaft S at a predetermined position and angle, a camera means 3 that obtains an image of the camshaft S, and a shaft holding means 2 and a camera means 3 that control the shaft holding means 2 and the camera means 3. and a processing bag W14 for inspecting the pump cam surface of the camshaft S.

従来装置では、シャフト保持手段2でカムシャフトSを
移動し、ポンプカムPをカメラ手段3の視野に入れる。
In the conventional device, the camshaft S is moved by the shaft holding means 2 to bring the pump cam P into the field of view of the camera means 3.

なお、■はスラスト受、Iはインテークカム、Eはエキ
ゾーストカムである。
Note that ■ is a thrust receiver, I is an intake cam, and E is an exhaust cam.

カメラ手段3で得られる画像は第8図に示すようになり
、そのX軸における明暗は第9図に示すようになる。つ
まり、ポンプカム面PCの部分が明るく、軸Aの部分が
暗くなる。そこで、適当な闇値L0を定めれば、ポンプ
カム面Peの端縁の位置X宜、X2を検出できる。
The image obtained by the camera means 3 is as shown in FIG. 8, and its brightness on the X axis is as shown in FIG. 9. In other words, the pump cam surface PC part is bright and the axis A part is dark. Therefore, by determining an appropriate darkness value L0, the position X2 of the edge of the pump cam surface Pe can be detected.

そして、第10図に示すように、検出した位置x1、X
2間の領域を含むようにウィンドウWを設定し、カムシ
ャフトSを回転しつつ、前記ウィンドウW内に欠陥部分
があるか否かを検査している。
Then, as shown in FIG. 10, the detected positions x1,
A window W is set to include the area between 2 and 2, and while the camshaft S is rotated, it is inspected whether or not there is a defective part within the window W.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

近年、カムシャフトにTIG焼入れ処理が行われるよう
になったが、そのTIG焼入れ処理によってカムの端縁
に「だれ」が発生する場合がある。
In recent years, camshafts have been subjected to TIG hardening, but this TIG hardening can sometimes cause droop on the edge of the cam.

第11図に斜線を施した部分は「だれ」を表している。The shaded area in FIG. 11 represents "who".

ところが、第12図および第13図に示すように、「だ
れ」によってポンプカムPの端縁Paに対応するi!!
像部分は暗部になるので、実際の端縁PJの位置x、、
x2よりも内側の位置X、+δ1゜X2−δ2に端縁が
あるかのように誤って検出されることになる。
However, as shown in FIGS. 12 and 13, the i! !
Since the image part will be a dark part, the actual position of the edge PJ x,
It will be erroneously detected as if there was an edge at position X, +δ1°X2−δ2, which is inside x2.

この場合、第14図に示すように、ウィンドウWがポン
プカムPの実際の幅より小さくなり、「だれ」の部分が
ウィンドウW外へ出るので、欠陥の一つである「だれ」
を発見できない問題を生じる。
In this case, as shown in FIG. 14, the window W becomes smaller than the actual width of the pump cam P, and the "whole" part extends outside the window W, which is one of the defects.
A problem arises in which it is not possible to discover.

従って、本発明の目的とするところは、TIG焼入れ処
理によって「だれ」が発生しても好適にポンプカム面の
検査を行うことが出来るカムシャフトのポンプカム面検
査装置を提供することにある。
Therefore, an object of the present invention is to provide a pump cam surface inspection device for a camshaft that can suitably inspect the pump cam surface even if "sagging" occurs due to the TIG hardening process.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のカムシャフトのポンプカム面検査装置は、TI
G焼入れ処理を行ったカムシャフトのポンプカム面の欠
陥を検査するための装置であって、ポンプカムおよびポ
ンプカムに近接するインテークカムまたはエキゾースト
カムのベースサークル部分を含む第1の画像を得る第1
の撮像手段と、第1の画像の前記ベースサークル部分か
らポンプカム位置を算出してウィンドウ位置を決定する
ウィンドウ位置決定手段と、第1の画像に前記ウィンド
ウを設定するウィンドウ設定手段と、カムシャフトを回
転させてポンプカム面の画像を得つつウィンドウ内につ
いて欠陥の検査を行う検査手段とを具備してなることを
構成上の特徴とするものである。
The camshaft pump cam surface inspection device of the present invention is a TI
A device for inspecting defects on a pump cam surface of a camshaft that has been subjected to a G-quenching treatment, the device obtaining a first image including a pump cam and a base circle portion of an intake cam or an exhaust cam adjacent to the pump cam.
an imaging means for determining the window position by calculating the pump cam position from the base circle portion of the first image; a window setting means for setting the window in the first image; The structure is characterized in that it includes an inspection means for inspecting the inside of the window for defects while rotating the pump cam to obtain an image of the pump cam surface.

〔作用〕[Effect]

TIG焼入れ処理はカム面に対して行われるが、それは
ポンプカムの全周面およびインテークカム、エキゾース
トカムのカム部であり、インテークカム、エキゾースト
カムのベースサークル部(第2図のIb)には行われな
い、従って、インテークカム、エキゾーストカムのベー
スサークル部には「だれ」が発生することはない。
TIG hardening treatment is performed on the cam surface, which is the entire circumferential surface of the pump cam and the cam portions of the intake cam and exhaust cam. Therefore, there will be no "droop" in the base circle portions of the intake cam and exhaust cam.

そこで、インテークカムまたはエキゾーストカムのベー
スサークル部の画像に基づいてカムの位置を検出すれば
、「だれ」よる影響を受けないで実際のインテークカム
またはエキゾーストカムの位置が分かる。他方、インテ
ークカムまたはエキゾーストカムとポンプカムの距離は
精度高く製作されているから、前記インテークカムまた
はエキゾーストカムの位置からポンプカムの位置を精度
高く算出できる。従って、実際のポンプカムの位置に対
応させて適正にウィンドウ位置を決められすなわち、画
像の前記ウィンドウ位置にウィンドウを設定すれば、そ
のウィンドウ内にポンプカムの端縁も必ず含まれ、「だ
れ」が発生しておれば欠陥として発見されることになる
Therefore, by detecting the position of the cam based on the image of the base circle portion of the intake cam or exhaust cam, the actual position of the intake cam or exhaust cam can be determined without being influenced by "who". On the other hand, since the distance between the intake cam or exhaust cam and the pump cam is manufactured with high precision, the position of the pump cam can be calculated with high precision from the position of the intake cam or exhaust cam. Therefore, if the window position can be determined appropriately in accordance with the actual position of the pump cam, that is, if a window is set at the window position in the image, the edge of the pump cam will always be included in the window, and "whoop" will occur. If you do, it will be discovered as a defect.

〔実施例〕〔Example〕

以下、図に示す実施例に基づいて本発明を更に詳しく説
明する。ここに第1図は本発明の一実施例のカムシャフ
トのポンプカム面検査装置の構成模式図、第2図は第1
の画像を得る状態のカム位置説明図、第3図は第1の画
像の例示図、第4図は第1の画像における明暗分布図、
第5図はカムシャフトを回転させてポンプカム面の画像
を得る一つの状態のカム位置説明図、第6図は第5図に
示す位置で得られる画像とウィンドウの例示図である。
Hereinafter, the present invention will be explained in more detail based on embodiments shown in the drawings. Here, FIG. 1 is a schematic diagram of the configuration of a pump cam surface inspection device for a camshaft according to an embodiment of the present invention, and FIG.
3 is an illustration of the first image, and FIG. 4 is a diagram of the brightness distribution in the first image.
FIG. 5 is an explanatory view of the cam position in one state in which an image of the pump cam surface is obtained by rotating the camshaft, and FIG. 6 is an exemplary view of the image and window obtained at the position shown in FIG. 5.

なお、以下の実施例により本発明が限定されるものでは
ない。
Note that the present invention is not limited to the following examples.

第1図に示すように、カムシャフトのポンプカム面検査
装置i!1は、シャフト保持手段2と、カメラ手段3と
、処理手段4とからなっている。
As shown in Fig. 1, the camshaft pump cam surface inspection device i! 1 consists of a shaft holding means 2, a camera means 3, and a processing means 4.

処理手段4は、シャフト保持手段2を駆動して、ポンプ
カムPおよび隣接するインテークカムrが同時にカメラ
手段3の視野に入るようにし、次いで、第2図に示すよ
うに、インテークカムIのベースサークル部lしが撮像
方向く矢印)に向くようにする。
The processing means 4 drives the shaft holding means 2 so that the pump cam P and the adjacent intake cam r are simultaneously in the field of view of the camera means 3, and then the base circle of the intake cam I, as shown in FIG. Make sure that the top part faces the direction of the image (arrow).

ここで得られる画像すなわち第1の画像は、第3図に示
すように、インテークカムIのベースサークル部■トの
部分を含む画像となるが、ベースサークル部IしにはT
IG焼入れ処理がなされていないから、その端縁I、に
は「だれ」が発生していない。
The image obtained here, that is, the first image, includes the base circle portion of the intake cam I, as shown in FIG.
Since the IG hardening process is not performed, there is no "sagging" on the edge I.

処理手段4は、第4図に示すように、第1の画像のX軸
上の明暗と所定の閾値L0とを比較し、インテークカム
lの位II X 3を検出する。上述したように、イン
テークカムIのベースサークル部■トの端縁!1には「
だれ」が発生していないから、正確にインテークカム■
の位置X3を得ることができる。
As shown in FIG. 4, the processing means 4 compares the brightness of the first image on the X-axis with a predetermined threshold L0, and detects the position II x 3 of the intake cam l. As mentioned above, the edge of the base circle part of the intake cam I! 1 has “
The intake cam is accurate because no one has occurred.■
The position X3 can be obtained.

次に、処理手段4は、予め設定されていたポンプカムP
とインテークカムIの距離定数a、bと前記位置X3と
に基づいて、ウィンドウ位置を算出する。すなわち、X
3−aからX3−bまでの領域を含むようにウィンドウ
位置を決定する。
Next, the processing means 4 processes the pump cam P which has been set in advance.
The window position is calculated based on the distance constants a and b of the intake cam I and the position X3. That is, X
The window position is determined to include the area from 3-a to X3-b.

そして、処理手段4は、その決定した位置にウィンドウ
Wを設定する。
Then, the processing means 4 sets the window W at the determined position.

次ぎに、処理手段4は、シャフト保持手段2によりカム
シャフトSを回転し、ポンプカム面PCの各部を順にカ
メラ手段3で画像化しつつ、ウィンドウW内について欠
陥の検査を行う、その一つの状態を第5図および第6図
に示すが、第6図から理解されるように、ウィンドウW
はポンプカムPを正しく含んでおり、従って、欠陥の一
種である端縁P−の「だれ」をも好適に発見し得ること
となる。
Next, the processing means 4 rotates the camshaft S by the shaft holding means 2, sequentially images each part of the pump cam surface PC with the camera means 3, and inspects the inside of the window W for defects. As shown in FIGS. 5 and 6, as understood from FIG. 6, the window W
correctly includes the pump cam P, and therefore, it is possible to suitably discover the "looseness" of the edge P-, which is a type of defect.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、TIG焼入れ処理を行ったカムシャフ
トのポンプカム面の欠陥を検査するための装置であうで
、ポンプカムおよびポンプカムに近接するインテークカ
ムまたはエキゾーストカムのベースサークル部分を含む
第1の画像を得る第1の撮像手段と、第1の画像の前記
ベースサークル部分からポンプカム位置を算出してウィ
ンドウ位置を決定するウィンドウ位置決定手段と、第1
の画像に前記ウィンドウを設定するウィンドウ設定手段
と、カムシャフトを回転させてポンプカム面の画像を得
つつウィンドウ内について欠陥の検査を行う検査手段と
を具備してなることを特徴とするカムシャフトのポンプ
カム面検査装置が提供され、これによりTIC焼入れ処
理を行ったカムシャフトの場合でも好適にポンプカム面
の検査を行うことが出来るようになる。
According to the present invention, there is provided a device for inspecting defects on the pump cam surface of a camshaft that has been subjected to TIG hardening treatment, and the first image includes a pump cam and a base circle portion of an intake cam or an exhaust cam adjacent to the pump cam. a first imaging means for obtaining a first image; a window position determining means for determining a window position by calculating a pump cam position from the base circle portion of the first image;
A camshaft comprising: a window setting means for setting the window in an image of the camshaft; and an inspection means for inspecting the inside of the window for defects while rotating the camshaft to obtain an image of the pump cam surface. A pump cam surface inspection device is provided, which makes it possible to suitably inspect the pump cam surface even in the case of a camshaft that has been subjected to TIC hardening treatment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例のカムシャフトのポンプカム
面検査装置の構成模式図、第2図は第1の画像を得る状
態のカム位f!!説明図、第3図は第1の画像の例示図
、第4図は第1の画像における明暗分布図、第5図はカ
ムシャフトを回転させてポンプカム面の画像を得る一つ
の状態のカム位置説明図、第6図は第5図に示す位置で
得られる画像とウィンドウの例示図、第7図は従来装置
における検査時のカム位置説明図、第8図は第7図に示
す状態で得られる画像の例示図、第9図は第8図のX軸
上の明暗分布図、第10図は第8図に示す画像とウィン
ドウの関係を示す例示図、第11図はTIG焼入れ処理
により「だれ」の発生したカムに対しての第7図相当図
、第12図は同第8図相当図、第13図は同第9図相当
図、第14図は同第10図相当図である。 〔符号の説明〕 ■・・・カムシャフトのポンプカム面検査装置2・・・
シャフト保持手段 3・・・カメラ手段 4・・・処理手段 S・・・カムシャフト ■・・・インテークカム ■し・・・ベースサークル部 l#・・・ベースサークル部の端縁 P・・・ポンプカム PC・・・ポンプカム面 Pd・・・ポンプカム面の端縁 W・・・ウィンドウ。 出願人  ダイハツ工業株式会社
Fig. 1 is a schematic diagram of the configuration of a pump cam surface inspection device for a camshaft according to an embodiment of the present invention, and Fig. 2 shows the cam position f! in the state in which the first image is obtained. ! Explanatory diagram, Figure 3 is an example diagram of the first image, Figure 4 is a brightness distribution diagram in the first image, Figure 5 is the cam position in one state in which the image of the pump cam surface is obtained by rotating the camshaft. 6 is an illustration of the image and window obtained at the position shown in FIG. 5, FIG. 7 is an explanatory diagram of the cam position during inspection in the conventional device, and FIG. 8 is an illustration of the image obtained in the state shown in FIG. 7. 9 is a diagram showing the brightness distribution on the X axis of FIG. 8, FIG. 10 is an illustrative diagram showing the relationship between the image shown in FIG. 8 and the window, and FIG. 7 is a diagram corresponding to the cam in which the droop occurred, FIG. 12 is a diagram equivalent to Figure 8, FIG. 13 is a diagram equivalent to Figure 9, and Figure 14 is a diagram equivalent to Figure 10. . [Explanation of symbols] ■...Camshaft pump cam surface inspection device 2...
Shaft holding means 3...Camera means 4...Processing means S...Camshaft ■...Intake cam ■Base circle portion l#...Edge of base circle portion P... Pump cam PC...Pump cam surface Pd...Edge W of the pump cam surface...Window. Applicant Daihatsu Motor Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 1.TIG焼入れ処理を行ったカムシャフトのポンプカ
ム面の欠陥を検査するための装置であって、ポンプカム
およびポンプカムに近接するインテークカムまたはエキ
ゾーストカムのベースサークル部分を含む第1の画像を
得る第1の撮像手段と、第1の画像の前記ベースサーク
ル部分からポンプカム位置を算出してウインドウ位置を
決定するウインドウ位置決定手段と、第1の画像に前記
ウインドウを設定するウインドウ設定手段と、カムシャ
フトを回転させてポンプカム面の画像を得つつウインド
ウ内について欠陥の検査を行う検査手段とを具備してな
ることを特徴とするカムシャフトのポンプカム面検査装
置。
1. A first imaging device for inspecting defects on a pump cam surface of a camshaft subjected to TIG hardening treatment, which obtains a first image including a pump cam and a base circle portion of an intake cam or an exhaust cam adjacent to the pump cam. means, window position determining means for determining a window position by calculating a pump cam position from the base circle portion of a first image, window setting means for setting the window in the first image, and rotating a camshaft. 1. A pump cam surface inspection device for a camshaft, comprising: inspection means for inspecting the inside of the window for defects while obtaining an image of the pump cam surface.
JP12787988A 1988-05-25 1988-05-25 Pump shaft cam surface inspection device for cam shaft Expired - Fee Related JPH0619332B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12787988A JPH0619332B2 (en) 1988-05-25 1988-05-25 Pump shaft cam surface inspection device for cam shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12787988A JPH0619332B2 (en) 1988-05-25 1988-05-25 Pump shaft cam surface inspection device for cam shaft

Publications (2)

Publication Number Publication Date
JPH01297537A true JPH01297537A (en) 1989-11-30
JPH0619332B2 JPH0619332B2 (en) 1994-03-16

Family

ID=14970899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12787988A Expired - Fee Related JPH0619332B2 (en) 1988-05-25 1988-05-25 Pump shaft cam surface inspection device for cam shaft

Country Status (1)

Country Link
JP (1) JPH0619332B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013202907A1 (en) * 2013-02-22 2014-08-28 Mahle International Gmbh Testing device for testing camshaft of internal combustion engine of motor car, has measuring units arranged adjacent to each other along direction and simultaneously performing hardness and/or surface testing of individual cams of camshaft

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105157610A (en) * 2015-09-29 2015-12-16 哈尔滨东安发动机(集团)有限公司 Optical cam curve measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013202907A1 (en) * 2013-02-22 2014-08-28 Mahle International Gmbh Testing device for testing camshaft of internal combustion engine of motor car, has measuring units arranged adjacent to each other along direction and simultaneously performing hardness and/or surface testing of individual cams of camshaft

Also Published As

Publication number Publication date
JPH0619332B2 (en) 1994-03-16

Similar Documents

Publication Publication Date Title
KR100472129B1 (en) Defect detector and method of detecting defect
WO2016051841A1 (en) Inspection device and inspection method
WO2017141611A1 (en) Defect detection apparatus, defect detection method, and program
JPH0961134A (en) Method and apparatus for visual inspection of spherical object
JP2007093330A (en) Defect extraction device and defect extraction method
JP2022012629A (en) Inspection device and inspection method
JPH01297537A (en) Inspecting device for pump cam surface of cam shaft
JP2000046743A (en) Defect-inspecting device
JPS6043657B2 (en) Object condition inspection method
JP7089381B2 (en) Board inspection equipment, board processing equipment and board inspection method
JP3283356B2 (en) Surface inspection method
JPH07128240A (en) Inspection device of electrophotographic photoreceptor defect
US20010043736A1 (en) Method and system for detecting a defect in projected portions of an object having the projected portions formed in the same shape with a predetermined pitch along an arc
JPH01297536A (en) Inspecting device for cam shaft
JP2001004552A (en) Method and apparatus for inspecting defect of object surface
JP3321503B2 (en) Appearance inspection equipment for electronic components
JP2531750B2 (en) Cam inspection device
JPS6026973B2 (en) Object surface inspection method and device
JPH07128241A (en) Inspection device of electrophotographic photoreceptor defect
JPH05107197A (en) Surface layer defect detector
JP2004053338A (en) Method of inspecting defect of silicon wafer
JPH0755710A (en) Defect inspecting device for drum of photoreceptor
JP2019168232A (en) Substrate inspection device, substrate processing device, substrate inspection method, and substrate processing method
JP7017916B2 (en) Board inspection equipment
JP2006138768A (en) Inspection method of printed matter

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees