JPH01293580A - Manufacture of superconductive element - Google Patents
Manufacture of superconductive elementInfo
- Publication number
- JPH01293580A JPH01293580A JP63124515A JP12451588A JPH01293580A JP H01293580 A JPH01293580 A JP H01293580A JP 63124515 A JP63124515 A JP 63124515A JP 12451588 A JP12451588 A JP 12451588A JP H01293580 A JPH01293580 A JP H01293580A
- Authority
- JP
- Japan
- Prior art keywords
- superconductive
- groove
- bulk body
- slice
- superconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 238000002844 melting Methods 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 abstract 1
- 239000002887 superconductor Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明はジョセフソン接合を持つ超電導素子の製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Industrial Application Field The present invention relates to a method for manufacturing a superconducting element having a Josephson junction.
（ｒＶ）従来の技術
超電導素子の代表す゛るものとし−〔ジョセフソンｆ、
ｆ−が存在する。このジーＩ廿フソン素子は、一対の超
電導体を極めて薄い絶縁膜を介して対向させたもので、
超高速性のため、高速の論理回路や高速、高感度の検出
素子などに用いられる。この種の素子は、当然のこと乍
ら、その絶縁膜の厚みや超電導体の対向面積などがジー
１１−７ソン素子の特性に大きく影響し、特性安定のた
めにはそれらの精密な制御が不可欠である。(rV) shall be representative of conventional technology superconducting devices - [Josephson f.
f- exists. This G-I-Fson element consists of a pair of superconductors facing each other with an extremely thin insulating film interposed between them.
Due to its ultra-high speed, it is used in high-speed logic circuits and high-speed, high-sensitivity detection elements. Naturally, the thickness of the insulating film and the facing area of the superconductor greatly affect the characteristics of this type of element, and precise control of these is necessary to stabilize the characteristics. It is essential.
（ハ）発明が解決しようとする課頂
ところが超電導体の対向面は、数〜１０μｍのオーダが
要求され、また絶縁膜のＩＩＸみは１μｍ以下′ｒあり
、これらのオーダを厳密に再現性良く得る、−とは国難
。ヒされている。(c) Problems to be Solved by the Invention However, the facing surface of the superconductor is required to have a thickness on the order of several to 10 μm, and the IIX depth of the insulating film is less than 1 μm. Obtaining - is a national disaster. I've been hit.
（−）課題を解決４−るための丁段
本発明はこのような課題に鑑みし為されたものであっで
、鏡面研ｌＦｊされた一対の超電導バルク体を用意し、
該各バルク体の鏡面にジョセフソン接合を形成するに適
した間隔を設け〔多数の溝を穿ち、該溝付きの超電導バ
ルク体を該各溝が対向した状態で低融点ツノ′ラスを用
いて接着し、次に対向接ｎされたバルク体を１−配溝に
対して垂直方向にジョセフソン接合を形成するに適した
厚みに切断して超電導スライスを得、該スライスを接合
面に垂直で且つ上記溝を通る線に沿って切断するもので
ある。(-) How to solve the problem 4- The present invention has been made in view of such problems, and it prepares a pair of mirror-polished superconducting bulk bodies,
A number of grooves are provided on the mirror surface of each bulk body at intervals suitable for forming a Josephson junction, and the superconducting bulk body with the grooves is held with the grooves facing each other using a low melting point horn lath. The superconducting slice is obtained by bonding, and then cutting the face-to-face bulk body to a thickness suitable for forming a Josephson junction in a direction perpendicular to the first groove, and cutting the slice in a direction perpendicular to the bonding surface. In addition, the cut is made along a line passing through the groove.
（ホ）作用
本発明に依れば、厳密に制御された′、；：Ｉｔ！フソ
ン接合を有する超電導素子を再現性良く得ることができ
る。(e) Effect According to the present invention, strictly controlled ',;:It! A superconducting element having a Fuson junction can be obtained with good reproducibility.
（へ）実施例
本発明の第１の工程は、最近脚光を浴びている酸化物超
電導材料、例えばＹ Ｂ ａｔ Ｃｕ３０、−８のバル
ク体（１〉の−表面（２）を鏡面研磨するところにあろ
く第１図〉、このバルク体（１）の厚みは２ｍ−程度で
ある。(F) Example The first step of the present invention is to mirror-polish the surface (2) of the bulk body (1) of an oxide superconducting material that has recently been in the spotlight, such as Y Bat Cu30, -8. As shown in Fig. 1, the thickness of this bulk body (1) is about 2 m.
第２の工程は、第２図に示す如く、このバルク体（１）
の鏡面（２）にジ・萱セフソン接合を形成＃−るに適し
た１０μｍ程度の間隔を、即ち幅が１０μ麺の稜（３〉
・ を設けて多数のｉｌ！（４） を超音波加工法な
どに依って穿つところにある。尚、このときの溝（４）
・間隔は超電１素ｆ′の幅を設定することになるのｅ
、重要であり、１＋＋＋ｎ＋前後に設定。入れるのが好
ましいが、深さは余り重要ではなく、１００〜５００Ｉ
ＩＩｌｌＩ程度である。In the second step, as shown in Fig. 2, this bulk body (1)
Form a di-Kaya Sefson junction on the mirror surface (2) of #- with an interval of about 10 μm, that is, the edge of the noodle (3) with a width of 10 μm.
- Set up a large number of IL! (4) The hole is drilled using an ultrasonic processing method. In addition, the groove at this time (4)
・The spacing will set the width of the superelectric element f'.
, is important and is set around 1+++n+. It is preferable to insert it, but the depth is not very important.
It is about IIIllI.
第３の工程は、このように（、で得た溝（４〉付きのバ
ルク体（１）（１）の各稜（３） ・を対向させた状態
で４００ ’Ｃ程度の融点を持゛つ鉛系の低融点ガラス
（５）を用いて接着するところにある（第３図）、この
接着工程に依って低融点ガラス（５）の殆どは対向した
溝（４） に依−って形成される筒状の空洞内に溜るが
、対面後（３） の頂点間隙部分には１μｍ程度の厚み
で低融点ガラス（５）が存在することになる。ここで用
いられる低融点ガラスとしては、例えば、［］本電気硝
子（株）社製の’ＬＳ ０８００．＋が適している。The third step is to obtain a bulk body (1) with a melting point of about 400'C with each edge (3) of the bulk body (1) (1) with grooves (4) obtained in () facing each other in this way. This is where the lead-based low melting point glass (5) is bonded (Fig. 3).Due to this bonding process, most of the low melting point glass (5) is bonded by the opposing grooves (4). Although it accumulates in the formed cylindrical cavity, a low melting point glass (5) with a thickness of about 1 μm exists in the apex gap after facing (3).The low melting point glass used here is For example, 'LS 0800.+ manufactured by Hon Electric Glass Co., Ltd. is suitable.
第４の［程は、第３の工程を経て得られた対向接着バル
ク体（１）く１）をその溝（４） に対して垂直な一ノ
ｊ向にジ、１＋！フソン接合を得るのに適した１００μ
ｍ程度の厚みに切断して超電導スライス（６）・・を得
るところにある（第４図）。In the fourth step, the opposing adhesive bulk body (1) obtained through the third step is moved in one direction perpendicular to the groove (4), 1+! 100μ suitable for obtaining Fuson junction
The superconducting slice (6) is obtained by cutting the superconducting slice into a thickness of approximately 100 m (Fig. 4).
本発明の最終工程は、第５図に示４−ように超電導スラ
イス（６）を両バルク体（１）（１）の接合面に対して
垂直で且つ上記各溝（４）・・の略中心線に沿って切断
し、超電導素子（７）とするところにある。In the final step of the present invention, as shown in FIG. It is cut along the center line to form a superconducting element (7).
斯して得られた超電導素子（７〉は第６図に拡大して示
すように、両端部に各バルク体（１）（１）であった電
極部（ｓ ）（８）を有し、中央部は低融点ガラス（５
）（５）に依ってくびられ、且つその中心部にのみ微小
面積のジョセフソン接合（９）に依って連なっている。The thus obtained superconducting element (7) has electrode portions (s) (8) which were bulk bodies (1) (1) at both ends, as shown in an enlarged view in FIG. The center part is made of low melting point glass (5
) (5), and is connected only at its center by a Josephson junction (9) with a minute area.
そしてこの超電導素子〈７）の手法は、長さ２ ｍｍ、
幅ｌ１１１ｒＲ２厚さ１００μｍで、また′、；−３ｔ
！フソン接合の幅は１０μｍで、その間隙は１μｍであ
る。The method for this superconducting element (7) is as follows:
Width l111rR2 thickness 100μm, and ', ;-3t
! The width of the Fuson junction is 10 μm, and the gap therebetween is 1 μm.
尚、本発明の詳細な説明においては、超電導バルク体と
してＹ Ｂ ａｔｃｕｓＯｔ−８を例に挙げて説明した
が、Ｙ系以外の希土類は当然のこと、それ以外の例えば
Ｂ１系の超電導体も同様に用い得る。In the detailed explanation of the present invention, YBatcusOt-8 was used as an example of the superconducting bulk body, but it goes without saying that rare earths other than Y-based superconductors may be used, and other superconductors such as B1-based superconductors may also be used. It can be used for
また上記した超電導素子の具体的な寸法はあくよでも一
例であって、必要とするジョセフソン接合の特性に応じ
て種々変更し得ることは言を待たない。Further, the specific dimensions of the superconducting element described above are merely examples, and it goes without saying that they can be changed in various ways depending on the required characteristics of the Josephson junction.
（ト）発明の効果
本発明は以−トの説明から明らかな如く、溝付きの超電
導バルク体を該各溝が対向した状ｊＪｌで低融点ガラス
を用いて接着した後、上記溝に対して垂直方向にジョセ
フソン接合を形成するに適した厚みに切断して超電導ス
ライスを作り、そのスライスを接合面に垂直で且つ上記
溝を通る線に沿って切断しているので、超電導素子とし
て最も重要なジ、７セフソン接合が極めて高い精度でし
かも再現性良く得ることができる。(g) Effects of the Invention As is clear from the description below, the present invention is provided by bonding a superconducting bulk body with grooves using low-melting glass in such a manner that the grooves face each other, and then bonding the superconducting bulk body with grooves to the grooves. Superconducting slices are created by cutting to a thickness suitable for forming Josephson junctions in the vertical direction, and the slices are cut perpendicular to the bonding surface and along a line that passes through the grooves, so this is the most important superconducting element. However, a 7-Sephson junction can be obtained with extremely high precision and good reproducibility.
第１図〜第５図は本発明方法を工程順に示した斜視図、
第６図は本発明方法に依って得られた超電導素子の拡大
斜視図Ｃある。
（１）・ バルク体、
（３） 稜、
（４） 溝、
（５） 、低融点）ｆつ・ス、
（６） 超電導スジイス、
（７〉・・ 超電導素子、
（８）・ 電極部、
（９）・・・ジョセフソン接合。Figures 1 to 5 are perspective views showing the method of the present invention in the order of steps;
FIG. 6 is an enlarged perspective view C of a superconducting element obtained by the method of the present invention. (1) Bulk body, (3) Edge, (4) Groove, (5) Low melting point), (6) Superconducting strip, (7> Superconducting element, (8) Electrode part, (9)...Josephson junction.
Claims (1)
該各バルク体の鏡面にジョセフソン接合を形成するに適
した間隔を設けて多数の溝を穿ち、該溝付きの超電導バ
ルク体を該各溝が対向した状態で低融点ガラスを用いて
接着し、次に対向接着されたバルク体を上記溝に対して
垂直方向にジョセフソン接合を形成するに適した厚みに
切断して超電導スライスを得、該スライスを接合面に垂
直で且つ上記溝を通る線に沿って切断したことを特徴と
する超電導素子の製造方法。(1) Prepare a pair of mirror-polished superconducting bulk bodies,
A large number of grooves are bored at intervals suitable for forming a Josephson junction on the mirror surface of each bulk body, and the grooved superconducting bulk bodies are bonded using low-melting glass with the grooves facing each other. Next, the bulk body bonded face-to-face is cut to a thickness suitable for forming a Josephson junction in a direction perpendicular to the groove to obtain a superconducting slice, and the slice is cut perpendicular to the bonding surface and passing through the groove. A method for manufacturing a superconducting element, characterized in that it is cut along a line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63124515A JPH01293580A (en) | 1988-05-20 | 1988-05-20 | Manufacture of superconductive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63124515A JPH01293580A (en) | 1988-05-20 | 1988-05-20 | Manufacture of superconductive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01293580A true JPH01293580A (en) | 1989-11-27 |
Family
ID=14887392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63124515A Pending JPH01293580A (en) | 1988-05-20 | 1988-05-20 | Manufacture of superconductive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01293580A (en) |
-
1988
- 1988-05-20 JP JP63124515A patent/JPH01293580A/en active Pending
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