JPH01291657A - Reciprocating and rotational movement mechanism by means of superconductive coil - Google Patents

Abstract

PURPOSE:To improve controllability of a reciprocating and rotating movement mechanism, by constituting the driving system of the mechanism with a light superconductive material. CONSTITUTION:In a reciprocating and rotating movement mechanism a rod member 52 stands upright from the bottom of a base casing 50, an annular member 54 is arranged so as to surround the rod 52 on the upper surface of the top wall and a cylindrical member 56 stands upright and secured from its circumference. On the side of this cylindrical member 56 a liquid nitrogen supply pipe 58 is exhausted into the base casing 50 through the annular passage. On the upper surface of this annular member 54 four superconductive coil elements 60 are provided and are arranged to the regions of a quarter of the upper surface of the annular member 54 respectively. The upper part of the rod member 52 is formed as a contractile radial section 62, where a bearing bus member 64 is housed with unrestrained sliding, to which the 1st supporting plate element 68 is fixed and that is a surface to fit a permanent magnet element 70 and a superconductive coil element 72. A permanent magnet element 78 is fitted to the 2nd supporting plate element 76.

Description

[Detailed Description of the Invention] [Summary] A reciprocating motion/rotary motion mechanism capable of outputting reciprocating motion along a predetermined axial direction and rotary motion around the axis in a state that can be individually controlled, A reciprocating and rotating mechanism with a new configuration that can eliminate all problems caused by the use of bearings, gears, pole screws/nuts, etc., especially regarding reciprocating and rotating mechanisms that can be advantageously used in the field of industrial robots. A rod member, a first support plate element movably but non-rotatably attached to the rod member, and a first support plate element movably and rotatably attached to the rod member. a second support plate element, the first and second support plate elements being made of ferromagnetic material and movable integrally with each other along the rod member; A first support plate element functions as a stator and a second support plate element functions as a rotor.
An even number of permanent magnet elements are provided on one of the inner facing surfaces of the second support plate element along the periphery of the rod member in such a manner that the polarity thereof is alternately different, and on the other of the inner facing surfaces. is provided with an even number of superconducting coil elements and further comprises magnetic drive means for magnetically reciprocating the first and second support plate elements along the rod member, the magnetic drive means comprising at least one permanent superconducting coil element. It consists of a magnet element and at least one superconducting coil element,
The first permanent magnet element and the at least one superconducting coil element are attached to the outer surface of the first support plate element, and the other is immovable relative to the rod member. A reciprocating and rotational movement mechanism is configured, which is fixedly arranged to face the outer surface side of the support plate element.

[Industrial application field]

The present invention is a reciprocating motion/rotating motion mechanism capable of outputting reciprocating motion along a predetermined axial direction and rotary motion around the axis in a state that can be individually controlled, and is particularly advantageous in the field of industrial robots. This invention relates to a reciprocating and rotating mechanism that can be used.

[Conventional technology]

A reciprocating motion/rotary motion mechanism itself that can output a reciprocating motion along a predetermined axial direction and a rotational motion around the axis in a state that can be individually controlled is well known, and such a reciprocating motion/rotary motion mechanism An example of this is a telescopic rotation mechanism used to drive an arm of an industrial robot, the structure of which is schematically shown in FIG.

In FIG. 4, reference numeral 10 indicates a suitable base, on the upper surface of which a radial bearing 12 is provided.

A shaft portion of a gear 14 is rotatably received in the radial bearing 12 . Gear 14 is meshed with gear 16 , which is attached to the output shaft of a first DC motor 18 located adjacent base 10 . The first DC motor 18 has a rotary encoder 2 that detects its rotation amount.
0 is incorporated, thereby performing feedback control of the second DC motor 18.

A frame member 22 is fixed to the upper surface of the gear 14 and extends upwardly therefrom, and this frame member 22 is connected to the first DC
It is configured to rotate together with the gear 14 by driving the motor 18. Frame member 22 includes vertical wall portion 24
and three shelf sections projecting horizontally from the vertical wall section 24, namely a bottom shelf section 26, an intermediate shelf section 28, and a top shelf section 30. As shown, frame member 22 is fixedly attached to the top surface of gear 14 with its bottom shelf portion 26. The bottom shelf portion 26 and the middle shelf portion 28 of the frame member 22 are provided with radial bearings 32 and 34, respectively, with a pole screw element 36 disposed between the radial bearings 32 and 34. A second DC motor 38 is mounted to the upper surface of the top shelf section 39 of the frame member 22, and its output shaft extends through the top shelf section 39 and projects from the lower surface thereof. on the other hand,
The pole screw element 38 has an input shaft portion that passes through the radial bearing 34 and projects from the upper surface thereof, and has a second input shaft portion and a second input shaft portion.
The output shaft of the DC motor 38 is the coupling 40.
are connected to each other by. The second DC motor 38 has a built-in rotary encoder 42 that detects the amount of rotation thereof, and thereby performs feedback control of the second DC motor 38.

The entire movable assembly as described above is surrounded by an elongated cylindrical arm member 44 which is supported against the ball screw element 38. That is, a support piece element 46 protrudes from the inner wall surface of the cylindrical arm member 44 in the form of a cantilever, and a ball nut +- (not visible in FIG. 4) is incorporated into this support piece element 46, and a ball is inserted into the support piece element 46. By threading the threaded element 36, the cylindrical arm member 44 is supported against the ball threaded element 36. A vertically extending groove (not visible in FIG. 4) is formed at the tip of the support piece element 46.
A vertical guide rail element 48 provided on the vertical wall portion 24 of the frame member 22 is slidably received in the groove.

Note that an appropriate tool is attached to the upper tip of the cylindrical arm member 44, or another robot arm is attached via an appropriate joint.

As is clear from the above configuration, the first DC motor 18
The cylindrical arm member 44 rotates the frame member 22 and the ball screw element 3 about the axis of rotation of the gear 14.
6 and driven by the second DC motor 42, the cylindrical arm member 44 can be moved along the longitudinal axis of the ball screw element 36, thereby imparting a telescopic movement to the cylindrical arm member 44. and rotational motion will be given.

[Means to solve problems]

Now, the main problems of the conventional telescopic rotation mechanism, that is, the reciprocating motion/rotation motion mechanism as described above, include the following points.

(1) in that a number of gears are used to slow down the rotary motion of the first DC motor and transmit that rotary motion, and also to slow down the rotary motion of the second DC motor and transfer it to reciprocating motion; Since a reduction gear train and a ball screw/nut are used for converting into a conventional motor, the problem is that the overall structure becomes complicated and large, and its weight increases. In particular, when a heavy conventional telescopic rotation mechanism is used for the distal end arm of a multi-joint arm structure, the natural frequency of the entire multi-joint arm structure decreases, making it difficult to control its movement. The problem is that it becomes difficult.

That is, when attempting to move such a multi-jointed structure, its followability deteriorates and control becomes difficult.

(2) A large number of gears and ball screws/nuts are used, which generates a lot of dust, which makes it difficult to use conventional robots with telescopic rotation mechanisms in clean rooms such as precision parts processing factories where dust is averse. is also considered a problem.

(3) Another problem is that bearings, gears, ball screws/nuts, etc. are subject to wear and tear due to long-term use, and as a result, the working accuracy of robots with conventional telescoping and rotating mechanisms deteriorates. In short, conventional telescoping and rotating mechanisms are not suitable for robots that are required to work all day long.

(4) Furthermore, it is also a problem that bearings, gears, ball screws/nuts, etc. become sources of noise.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a reciprocating and rotating mechanism with a novel configuration that can overcome all of the various problems described above due to the use of bearings, gears, ball screws/nuts, and the like.

[Means to solve problems]

The reciprocating and rotational movement mechanism according to the present invention includes a rod member,
a first support plate element mounted movably relative to the rod member along its central axis but non-rotatably about the central axis; and a first support plate element movable relative to the rod member along its central axis; and a second support plate element rotatably mounted about the central axis. The first and second support plate elements are made of ferromagnetic material and are movable together with one another along the length of the rod member. In order to configure a flat motor in which the first support plate element functions as a stator and the second support plate element functions as a rotor, rods are provided on the opposite inner surfaces of the first and second support plate elements. An even number of permanent magnet elements are provided along the central axis of the member in a manner of alternating polarity, and an even number of superconducting coil elements are provided on the other of the inner facing surfaces. The reciprocating and rotary movement mechanism according to the present invention further comprises magnetic drive means for magnetically reciprocating the first and second support plate elements on the rod member along its central axis; The driving means is constituted by at least one permanent magnet element and at least one superconducting coil element, and either one of the at least one permanent magnet element and the at least one superconducting coil element is attached to the first support plate element. The first support plate element is attached to the outer surface and is fixedly arranged opposite the outer surface of the first support plate element in such a manner that the other side is immovable with respect to the rod member.

[For production]

According to the configuration of the reciprocating and rotational movement mechanism as described above, the reciprocating movement of the first and second support plate elements along the rod member is performed by the magnetic drive means. That is,
By switching the direction of energization of at least one superconducting coil that is one component of the magnetic drive means,
A magnetic attraction/repulsion force is created between the other component of the magnetic drive means, at least one permanent magnet and at least one superconducting coil, which causes the first and second support plate elements to Also, since a flat motor is constructed in which the first and second support plate elements function as a stator and a rotor, respectively, the second support plate element A rotational displacement can be performed on the plate element. Thus, the second
The support plate element may serve as the output of the reciprocating and rotary movement mechanism. In short, if the robot arm is attached to the second support plate element, the robot arm can reciprocate along a predetermined axial direction. Rotational movement around the t111 line can be performed.

〔Example〕

Next, with reference to FIGS. 1 and 2, an embodiment of the reciprocating motion/rotating motion mechanism according to the present invention will be described, and with reference to FIG. 3, an application example of the reciprocating motion/rotating motion mechanism will be described. I will explain about it.

In FIG. 1, reference numeral 50 indicates a base casing, and from the bottom of this base casing 50 there is a rod member 52.
stands upright and projects upwardly through the top wall of the base casing 5°. An annular member 54 is arranged on the upper surface of the top wall of the base casing 50 so as to surround the rod member 52, and a cylindrical member 56 is fixed to the annular member 54 in such a manner that it stands upright from its periphery. . Cylindrical member 5
A liquid nitrogen supply pipe 58 is connected to the side surface of the cylindrical member 56, and the liquid nitrogen supplied to the inside of the cylindrical member 56 is transferred to the rod member 52.
The liquid is discharged into the base casing 50 through an annular passage formed between the annular member 54 and the annular member 54 . In short, the cylindrical member 56 is always filled with liquid nitrogen, and its internal temperature is maintained at a predetermined low temperature.

Four superconducting coil elements 60 are provided on the upper surface of the annular member 54, and these superconducting coil elements 60 are each arranged in a quarter circle area on the upper surface of the annular member 54, as shown in FIG. 2A. In this embodiment, four superconducting coil elements 60 are provided on the upper surface of the annular member 54, but it is also possible to provide fewer or more superconducting coil elements.

The superconducting material of the superconducting coil element is Y-Ba-C.
It is possible to use a u-0 type material, and by placing it under the above-mentioned low temperature conditions, superconductivity can be obtained. The direction of energization to each of the four superconducting coil elements 60 shown in FIG. 4A can be switched, but the switching is done simultaneously and the energization is always in the same direction. That is, all the magnetic poles (N
Alternatively, S) is always the same.

The upper portion of the rod member 52 is formed as a reduced diameter portion 62, and a bearing hub member 64 is slidably accommodated in the reduced diameter portion 62. A longitudinal groove 66 is formed on the outer surface of the reduced diameter portion 62 along its central axis, and a ball element (not visible in FIG. 1) that is rotatably held on the inner surface of the bearing hub member 64 is formed in the longitudinal groove 66. is accommodated, so that the bearing hub member 64 can perform sliding movement relative to the reduced diameter portion 62 of the rod member 52, but cannot perform rotational movement about its central axis. .

A first support plate element 68 is fixedly supported on the bearing hub member 65, and this first support plate element 68 is connected to the cylindrical member 5.
The first support plate element 68 is fixed to the cough bearing hub member 65 in such a manner that the first support plate element 68 This means that a sliding movement can only take place along the reduced diameter section 62 of the rod member 52 together with the bearing plate element 65 . First support plate element 68 functions to provide a mounting surface for permanent magnet element 70 and superconducting coil element 72. The first support plate element 68 is constructed to include a sandwiched superconducting layer 74 therebetween, and the first support plate element 68 itself is made of a ferromagnetic material, such as pure iron. Although not shown, an insulating layer is appropriately applied between the superconducting layer 74 and the ferromagnetic material.

Eight fan-shaped permanent magnet elements 70 are attached to the lower surface of the first support plate element 6B in the arrangement shown in FIG. 2B. The surfaces facing the superconducting coil element 60 provided on the top surface have the same polarity. in short,
The lower surface of the sector-shaped permanent magnet element 70 may be a north pole, as shown in FIG. 2B, or a south pole.

In this embodiment, eight sector-shaped permanent magnets 70 are arranged adjacent to each other, but the number, shape, and arrangement of these permanent magnets are not limited in any way.

For example, a single annular permanent magnet may be used, or a suitable number of permanent magnet elements of any shape may be equally spaced on the underside of the first support plate element 68.

Four superconducting coil elements 72 are attached to the upper surface of the first support plate element 68 via the arrangement shown in FIG. 2C. In this embodiment, the arrangement of the superconducting coil elements 72 is the same as in the case of FIG. Must be individualized. Furthermore, as in the case of FIG. 4A, the energization of the four superconducting coil elements 72 can be switched individually;
The current direction is alternately opposite to the four superconducting coil elements 72, and the magnetic poles generated by the four superconducting coil elements 72 are alternately different. That is, when a north pole is generated by one diagonal pair of superconducting coil elements 72 among the four superconducting coil elements 72, the other diagonal pair of superconducting coil elements 72 generates an south pole. be made into

Further, a second support plate element 76 is coupled to the rotatable bearing hub member 64, and the second support plate element 76 is made of a ferromagnetic material such as pure iron, and the second support plate element 76 is made of a ferromagnetic material such as pure iron. 68 to maintain a predetermined spacing. The second support plate element 76 is mounted to the rotatable bearing hub member 64 such that the second support plate element 76 moves along the reduced diameter portion 62 of the rod member 52 with the bearing plate element 64 . and the reduced diameter portion 6
Rotational movement can be performed around the central axis of 2.

Eight fan-shaped permanent magnet elements 78 are attached to the lower surface of the second support plate element 76 in the arrangement form shown in the second diagram, and the lower surface of all the sector-shaped permanent magnet elements 78, that is, the first support plate The surfaces facing the superconducting coil element 72 disposed on the upper surface of the element 68 have alternately different polarities.

In this embodiment, the arrangement of the permanent magnet elements 78 is as shown in FIG.
However, the number of superconducting coil elements attached to the lower surface side of the second support plate element 76 must be an even number of at least two or more.

A rotary encoder 80 is provided in the central region of the first and second support plate elements 68 and 76 so as to surround the reduced diameter portion 62, and this rotary encoder 80 is made of two elements separated by a suitable space 81. One side is on the first support plate portion 68 side, and the other side is on the second support plate portion 68 side.
is attached to the support plate element 76 side. The rotary encoder 80 is configured to detect the amount of rotational displacement of the second support plate element 76 with respect to the first support plate element 68.

As can be seen in FIG. 1, the second support plate element 76 is attached to one end side of the cylindrical arm member 82 in such a manner as to close it, so that the cylindrical arm member 82
2 is placed in a pre-filled manner with respect to the cylindrical member 56. Note that a suitable sealing material is placed between the cylindrical member 56 and the cylindrical arm member 82 to prevent the liquid nitrogen within the cylindrical member 56 from leaking.

A linear encoder 8 is provided at the upper opening edge of the cylindrical member 56.
4 is attached, so that the amount of linear displacement (along the central axis of the rod member 52) of the cylindrical arm member 82 with respect to the cylindrical member 56 is detected.

As described above, the energization of the four superconducting coil elements 72 attached to the upper surface of the first support plate element 68 can be switched so that the four superconducting coil elements 72 alternately have different polarities. In addition, since the eight fan-shaped permanent magnet elements 78 attached to the lower surface of the second support plate element 76 are arranged so as to have different polarities alternately, the first and second support plate elements 76 A flat motor is constructed in which plate elements 68 and 76 serve as a stator and a rotor, respectively. In short, by switching the energization to the superconducting coil element 72, the second support plate element 76, and thus the cylindrical arm element 82, can perform a rotational movement in a predetermined direction relative to the first support plate element 68. It turns out.

Such rotational movement is feedback-controlled by the low-resolution encoder 80.

Further, the superconducting coil element 60 provided on the upper surface of the cylindrical member 56 and the permanent magnet element 70 attached to the lower surface of the first support plate element 68 connect the first and second support plate elements 68 and 76. It constitutes a magnetic drive means for causing the rod member 52 to reciprocate along the reduced diameter portion 62 by magnetic action. That is, by switching the energization to the superconducting coil element 60 as described above, magnetic attractive force or repulsive force acts between the superconducting coil element 60 and the permanent magnet element 70, and by controlling this force, The first and second support plate elements 68 and 76, and thus the cylindrical arm member 82, can reciprocate along the central axis of the rod member 52. Such reciprocating motion is feedback-controlled by the linear encoder 84.

It should be noted here that the first support plate element 68, with its intermediate superconducting layer 74, functions as a magnetic shield;
Therefore, a flat motor composed of a superconducting coil element 72 and a permanent magnet element 78, and a superconducting coil element 60
This means that the magnetic drive means constituted by the permanent magnet element 70 and the permanent magnet element 70 do not magnetically interfere with each other.

In the embodiment described above, the superconducting coil element 60 was provided on the upper surface of the cylindrical member 54, and the permanent magnet element 70 was attached to the lower surface of the first support plate element 68, but the arrangement relationship could be reversed. Needless to say, you can get it. Further, the same can be said about the arrangement relationship between the superconducting coil element 72 attached to the upper surface of the first support plate element 68 and the permanent magnet element 78 attached to the lower surface of the second support plate element 76.

Referring to FIG. 3, there is shown an example in which the reciprocating and rotating mechanism of FIG. 1 is applied to a mask supply robot device for supplying masks to a vertical X-ray exposure apparatus for semiconductor manufacturing. In FIG. 3, the reciprocating and rotating mechanism of FIG. 1 is generally designated by reference numeral 86. The entire reciprocating and rotating mechanism 86 is supported in a cantilever manner from a carrier 88 by mounting its base casing 50 thereon. That is,
The reciprocating and rotational movement mechanism 86 has a cylindrical arm member 8
2 will be arranged in such a manner that it will reciprocate in the horizontal direction. Although the carrier 88 is illustrated as a simple block in FIG. 3, it is capable of controlled movement in two dimensions in a horizontal plane along a predetermined path of movement, and also includes a reciprocating and rotational movement mechanism 86. The entire body can also be moved vertically under control.

In addition, the mask supply robot device includes a liquid nitrogen circulator 90.
A liquid nitrogen supply pipe 58 extending from the cylindrical member is connected to the liquid nitrogen circulator 9o, and a liquid nitrogen return pipe 92 extending from the base casing 5o is also connected. Note that the liquid nitrogen supply pipe 58 and the liquid nitrogen return pipe 9
2 is made of a flexible material, the liquid nitrogen circulator 9o is installed at a fixed position, and when the carrier 88 moves, the flexible liquid nitrogen supply pipe 58 and the liquid nitrogen return pipe 92 follow, It is preferable to reduce the load applied to the carrier 88.

A mask suction device 94 is attached to the tip side of the cylindrical arm member 82 of the reciprocating and rotational movement mechanism 86, and this mask suction device 94 uses a vacuum action to hold the mask holding ring 96 (the ring on which the mask is stretched). It is designed to absorb.

The mask supply robot device is further provided with a control unit 98 that not only controls the movement of the carrier 88 and the liquid nitrogen circulator 90, but also controls the reciprocating and rotational movements of the cylindrical arm member 82. is also controlled. That is, the control unit 9 controls the energization of the superconducting coil elements 60 and 72 based on the detection signals from the row encoder 8o and the linear encoder 84.
8.

FIG. 3 also shows a part of the above-mentioned vertical X-ray exposure apparatus, that is, a mask holder 100, and in FIG. It's shown. Reference numeral 102 indicates a control section of such a compact X-ray exposure apparatus, and the control section 102 and the control section 98 are in communication with each other, so that the mask supply robot apparatus and the vertical X-ray exposure apparatus are related to each other. It is ready to be activated.

Briefly describing an example of the operation of the mask supply robot device shown in FIG. 3, the mask supply robot device is moved to the mask storage location by the movement of the carrier 88;
Thereupon, the reciprocating and rotational movement mechanism 86 is activated, and the mask retaining ring 86 is attracted to the mask suction device 96 of the cylindrical arm member 82. The carrier 88 is then moved to the position shown in FIG.
and the mask holder 100 are aligned, and the reciprocating and rotational movement mechanism 86 is activated to rotate and advance the cylindrical arm member 82, thereby causing it to be sucked into the mask suction device. The mask ring 96 is adjusted to an appropriate posture relative to the mask holder 100 and brought into contact with the mask holder 100, so that the mask ring 96 is transferred to the mask holder 100.

FIG. 3 shows a case where the reciprocating motion/rotating motion mechanism according to the present invention is applied to a mask supplying robot device.
It goes without saying that such a reciprocating and rotating mechanism can be applied to various robot devices.

〔Effect of the invention〕

As is clear from the above description, in the reciprocating motion/rotating motion mechanism according to the present invention, the drive system is constructed using a relatively lightweight superconducting material. Compared to the conventional reciprocating and rotary motion system using a screw/nut as the drive system, a significant weight reduction can be achieved.

Therefore, it can be used to reduce the weight of the multi-jointed robot arm structure, and also prevent the natural frequency from decreasing and improve controllability.

Furthermore, in the reciprocating motion/rotating motion mechanism according to the present invention, since most of its drive system is non-contact, it is possible to suppress the generation of dust as much as possible, and for this reason, the reciprocating motion/rotating motion mechanism according to the present invention is used The robotic device will be particularly suited for use in clean rooms in precision processing factories. On the other hand, since most of the drive system is non-contact, it not only has the advantage of suppressing deterioration of operating accuracy even after long-term use, but also has the effect of reducing noise.

Furthermore, according to the reciprocating and rotational movement mechanism according to the present invention,
Since the cylindrical arm member performs reciprocating motion in a floating state, the impact when the cylindrical arm members collide is softened. Therefore, the reciprocating and rotational movement mechanism according to the present invention is capable of reciprocating the impact like the above-mentioned mask supply robot device. This is effective for robot devices that involve joint movements.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional view showing the schematic structure of the reciprocating and rotating mechanism according to the present invention, and FIGS. 2A, 2B, 2C, and 2 are lines 8-A in FIG. , B-B line, C
- A cross-sectional view taken along the C line and the D-D line, FIG. 3 is a schematic diagram showing an application example in which the reciprocating and rotational movement mechanism of FIG. 1 is applied to a mask supply robot device, and FIG. 4 is a multi-jointed arm. FIG. 2 is a schematic vertical cross-sectional view showing a conventional telescoping and rotating mechanism used in a mold robot device. 50... Base casing, 52... Rod member, 54... Annular member, 56... Cylindrical member, 58...
...Liquid nitrogen supply pipe, 60...Superconducting coil element, 6
2... Reduced diameter portion, 64... Bearing hub member, 66...
・Longitudinal groove portion, 68...first support plate member, 70・
... Permanent magnet element, 72 ... Superconducting coil element, 74
...Superconducting layer, 76...Second support plate element, 7th...
...Permanent magnet element, 80...Rotary encoder, 8
2... Cylindrical arm member, 84... Linear encoder.

Claims (1)

[Claims] 1. A rod member (52) and a first support plate element (68) mounted movably relative to the rod member along its central axis but non-rotatably about the central axis;
and a second support plate element (76) mounted to the rod member so as to be movable along the central axis thereof and rotatable around the central axis; The support plate elements are made of ferromagnetic material and are movable together with each other along the longitudinal direction of the rod member, the first support plate element serving as a stator and the second support plate element acting as a stator. In order to construct a flat motor in which the support plate element functions as a rotor, one of the inner opposing surfaces of the first and second support plate elements has an even number of permanent holes along the central axis of the rod member. Magnetic element (78
) are provided in such a manner that their polarities alternately differ, and an even number of superconducting coil elements (72) are provided on the other of the inner opposing surfaces, and further, the first and second support plate elements are magnetically connected. magnetic drive means for operatively causing reciprocating movement on said rod member along its central axis, said magnetic drive means comprising at least one permanent magnet element (70);
) and at least one superconducting coil element (60), one of the at least one permanent magnet element and the at least one superconducting coil element being attached to the outer surface of the first support plate element; A reciprocating and rotational movement mechanism, characterized in that the other side is fixedly disposed facing the outer surface of the first support plate element in such a manner that the other side is immovable with respect to the rod member.