JP3151492B2 - Slide device - Google Patents
Slide deviceInfo
- Publication number
- JP3151492B2 JP3151492B2 JP04383891A JP4383891A JP3151492B2 JP 3151492 B2 JP3151492 B2 JP 3151492B2 JP 04383891 A JP04383891 A JP 04383891A JP 4383891 A JP4383891 A JP 4383891A JP 3151492 B2 JP3151492 B2 JP 3151492B2
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- permanent magnet
- superconductor
- movable
- slide device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】この発明は、たとえば磁気浮上ス
ライド、縦型拡散炉のウェハ搬送装置、真空用ウェハ搬
送ロボットなどに使用されるスライド装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slide device used for, for example, a magnetic levitation slide, a wafer transfer device of a vertical diffusion furnace, a wafer transfer robot for vacuum, and the like.
【０００２】[0002]
【従来の技術および発明の課題】この種のスライド装置
として、従来、転がり軸受を用いたいわゆるスライドベ
アリングが使用されていた。2. Description of the Related Art As this type of slide device, a so-called slide bearing using a rolling bearing has conventionally been used.
【０００３】ところが、転がり軸受が用いられているた
め、粉塵の発生が避けられず、真空またはクリーン環境
下での使用には問題があった。However, since a rolling bearing is used, generation of dust is inevitable, and there is a problem in use in a vacuum or clean environment.
【０００４】このため、磁気軸受の使用が考えられる
が、この場合は、装置が大掛りになり、コストが高く、
電気的、磁気的なトラブルも多い。For this reason, the use of a magnetic bearing is conceivable, but in this case, the device becomes large-scale, and the cost is high.
There are many electrical and magnetic problems.
【０００５】この発明の目的は、上記の問題を解決し、
粉塵の発生やトラブルの少ないスライド装置を提供する
ことにある。An object of the present invention is to solve the above problems,
An object of the present invention is to provide a slide device with less generation of dust and trouble.
【０００６】[0006]
【課題を解決するための手段】この発明によるスライド
装置は、固定部分に対してそれぞれ移動可能に配置され
た第１可動体および第２可動体、２つの可動体のいずれ
か一方を移動させる駆動手段、２つの可動体の対向面の
一方に設けられた永久磁石部、ならびに上記対向面の他
方において上記永久磁石部の磁束が所定量侵入する離間
位置に設けられかつその内部に常電導粒子が混在させら
れた超電導体を備えており、超電導体が冷却されて超電
導状態となったさいにその内部に侵入した永久磁石部の
磁束が常電導粒子により拘束されるようになされている
ものである。SUMMARY OF THE INVENTION A slide device according to the present invention drives one of a first movable body, a second movable body, and two movable bodies which are movably disposed with respect to a fixed portion. Means, a permanent magnet portion provided on one of the opposing surfaces of the two movable bodies, and provided on the other of the opposing surfaces at a separated position where the magnetic flux of the permanent magnet portion penetrates by a predetermined amount, and normal conducting particles are contained therein. Mixed
The superconductor is cooled and the superconductor is cooled.
When the permanent magnet part has entered the interior
The magnetic flux is constrained by the normal conducting particles .
【０００７】必要があれば、第１可動体の少なくとも一
部および第２可動体の少なくとも一部がそれぞれ固定部
分に対して回転可能になっており、これら２つの可動体
の回転部分の間に磁気継手手段が設けられ、２つの可動
体の一方を回転駆動させる回転駆動手段が設けられる。If necessary, at least a part of the first movable body and at least a part of the second movable body are each rotatable with respect to the fixed part, and between the rotating parts of these two movable bodies. Magnetic coupling means is provided, and rotation driving means for rotating one of the two movable bodies is provided.
【０００８】また、必要があれば、第１可動体の移動空
間と第２可動体の移動空間が非磁性体で隔絶される。If necessary, the moving space of the first movable body and the moving space of the second movable body are separated by a non-magnetic material.
【０００９】[0009]
【作用】永久磁石部の磁束が所定量侵入する離間位置に
設けられた超電導体が冷却されて超電導状態になると、
永久磁石部から発せられる磁束の多くが超電導体の内部
に侵入して常電導粒子により拘束されることになる（ト
ラップ現象）。ここで、超電導体はその内部に常電導体
粒子が均一に混在されているため、超電導体内部への侵
入磁束の分布が一定となり、そのため、あたかも超電導
体に立設した仮想ピンに永久磁石部が貫かれたようにな
り、超電導体に対して永久磁石部が拘束される。そのた
め、永久磁石部が設けられた可動体は、超電導体が設け
られた可動体に対して離れた位置にきわめて安定的に浮
上した状態で支持されることになる。そして、いずれか
の可動体を駆動手段により移動させると、超電導体と永
久磁石部との保持力によって他方の可動体も移動させら
れ、一方の可動体により他方の可動体を非接触で駆動す
ることができる。超電導体に侵入した永久磁石部の磁束
による拘束作用でもって、永久磁石部と超電導体とが所
定の間隔をあけて対向した状態で保持され、２つの可動
体の一方を駆動手段で移動させることにより、他方を非
接触で移動させることができる。 [Function] At a separated position where a predetermined amount of magnetic flux of the permanent magnet portion enters.
When the provided superconductor is cooled and becomes superconductive,
Most of the magnetic flux emitted from the permanent magnet is inside the superconductor.
Penetrate into the ground and be restrained by normal conducting particles (T
Wrap phenomenon). Here, the superconductor has a normal conductor inside
Since the particles are uniformly mixed, the penetration into the superconductor
The distribution of the incoming magnetic flux is constant, so it is as if
It looks like a permanent pin has penetrated a virtual pin standing on the body.
As a result, the permanent magnet portion is restrained by the superconductor. That
The movable body provided with the permanent magnet part has a superconductor
Very stable floating away from the movable body
It will be supported in the up state. And either
When the movable body is moved by the driving means,
The other movable body is also moved by the holding force with the
And one of the movable bodies drives the other
Can be Magnetic flux of the permanent magnet that has penetrated the superconductor
The permanent magnet part and the superconductor are
It is held in a state facing each other at a fixed interval and two movable
By moving one of the bodies by the driving means, the other
Can be moved by contact.
【００１０】第１可動体の少なくとも一部および第２可
動体の少なくとも一部がそれぞれ固定部分に対して回転
可能になっており、これら２つの可動体の回転部分の間
に磁気継手手段が設けられ、２つの可動体の一方を回転
駆動させる回転駆動手段が設けられていれば、回転駆動
手段で可動体の一方を回転駆動させることにより、他方
を非接触で回転させることができる。At least a part of the first movable body and at least a part of the second movable body are respectively rotatable with respect to the fixed part, and magnetic coupling means is provided between the rotating parts of the two movable bodies. In addition, if there is provided a rotary drive unit for rotating one of the two movable bodies, the other can be rotated in a non-contact manner by rotating one of the movable bodies by the rotary drive unit.
【００１１】第１可動体の移動空間と第２可動体の移動
空間が非磁性体で隔絶されていれば、２つの可動体の一
方を他方から隔絶して真空状態またはクリーン状態に保
持するようなことができる。If the moving space of the first movable member and the moving space of the second movable member are separated by a non-magnetic member, one of the two movable members is separated from the other and held in a vacuum state or a clean state. Can do.
【００１２】[0012]
【実施例】以下、図面を参照して、この発明の実施例に
ついて説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１３】図１は、第１実施例を示している。FIG. 1 shows a first embodiment.
【００１４】図１において、銅やステンレス鋼などの非
磁性体製の垂直円筒体(1) の外側に第１可動体(2) が上
下移動可能に配置され、同内側に第２可動体(3) が上下
移動可能に配置されている。In FIG. 1, a first movable body (2) is vertically movably arranged outside a vertical cylindrical body (1) made of a nonmagnetic material such as copper or stainless steel, and a second movable body (2) is arranged inside the same. 3) is arranged to be able to move up and down.
【００１５】第２可動体(3) は垂直円柱状をなし、その
外径は円筒体(1) の内径より少し小さい。第２可動体
(3) は強磁性体よりなり、少なくとも外周部がたとえば
上端がＮ極、下端がＳ極の永久磁石部(4) となってい
る。The second movable body (3) has a vertical columnar shape, and its outer diameter is slightly smaller than the inner diameter of the cylindrical body (1). 2nd movable body
(3) is made of a ferromagnetic material, and at least the outer peripheral portion is, for example, a permanent magnet portion (4) having an N pole at an upper end and an S pole at a lower end.
【００１６】第１可動体(2) は円筒体(1) の周囲に密に
はめられた中空円環状の冷却ハウジング(5) を備えてお
り、その内部に超電導体(6) が収納されている。第１可
動体(2) は、たとえば油圧シリンダ、電磁アクチュエー
タ、モータなどで駆動されるボールねじや直動ベアリン
グなどの適宜な駆動手段(D) により、円筒体(1) に沿っ
て上下に移動させられる。The first movable body (2) is provided with a hollow annular cooling housing (5) closely fitted around the cylindrical body (1), in which the superconductor (6) is housed. I have. The first movable body (2) is moved up and down along the cylindrical body (1) by an appropriate driving means (D) such as a ball screw or a linear bearing driven by a hydraulic cylinder, an electromagnetic actuator, a motor, or the like. Let me do.
【００１７】超電導体(6) は、イットリウム系高温超電
導体、たとえばＹＢａ２Ｃｕ３Ｏｘからなる基板の内部
に常電導粒子（Ｙ２Ｂａ１Ｃｕ１）を均一に混在させた
ものからなり、永久磁石部(4) から発せられる磁束侵入
を拘束する性質を持つものである。そして、超電導体
(6) は、永久磁石部(4) の磁束が所定量侵入する離間位
置に配置されている。The superconductor (6) is composed of a substrate made of an yttrium-based high-temperature superconductor, for example, YBa 2 Cu 3 O x, in which normal conducting particles (Y 2 Ba 1 Cu 1 ) are uniformly mixed in a substrate. It has the property of restricting the intrusion of magnetic flux emitted from the permanent magnet section (4). And the superconductor
(6) is arranged at a separated position where a predetermined amount of magnetic flux of the permanent magnet portion (4) enters.
【００１８】スライド装置を作動させる場合、超電導体
(6)は冷却ハウジング(5)内に循環させられる適当な冷媒
によって冷却され、超電導状態に保持される。このた
め、第２可動体(3)の永久磁石部(4)から発せられる磁束
の多くが超電導体(6)の内部に侵入して常電導粒子によ
り拘束されることになる（トラップ現象）。ここで、超
電導体(6)はその内部に常電導体粒子が均一に混在され
ているため、超電導体(6)内部への侵入磁束の分布が一
定となり、そのため、あたかも超電導体(6)に立設した
仮想ピンに永久磁石部(4)が貫かれたようになり、超電
導体(6)に対して第２可動体(3)が拘束される。そのた
め、第２可動体(3)は、円筒体(1)の内周面から少し離れ
た位置にきわめて安定的に浮上した状態で、アキシアル
方向およびラジアル方向に支持されることになる。そし
て、第１可動体(2)を上下に移動させると、超電導体(6)
と永久磁石部(4)との保持力によって第２可動体(3)も上
下に移動させられ、第１可動体(2)により第２可動体(3)
を非接触で駆動することができる。When operating the slide device, the superconductor
(6) is cooled by a suitable refrigerant circulated in the cooling housing (5) and is kept in a superconductive state. For this reason, much of the magnetic flux emitted from the permanent magnet portion (4) of the second movable body (3) enters the inside of the superconductor (6) and is generated by the normal conducting particles.
Ri will be bound (trap phenomenon). Here, in the superconductor (6), since the normal conductor particles are uniformly mixed therein, the distribution of the magnetic flux penetrating into the superconductor (6) becomes constant, and therefore, as if the superconductor (6) The permanent magnet portion (4) is penetrated by the standing virtual pin, and the second movable body (3) is restrained by the superconductor (6). Therefore, the second movable body (3) is supported in the axial direction and the radial direction with the second movable body (3) floating very stably at a position slightly away from the inner peripheral surface of the cylindrical body (1). Then, when the first movable body (2) is moved up and down, the superconductor (6)
The second movable body (3) is also moved up and down by the holding force between the first movable body (3) and the second movable body (3).
Can be driven in a non-contact manner.
【００１９】円筒体(1) 内は、必要があれば、真空状態
やクリーン状態に保持される。その場合、第１可動体
(2) とその駆動手段は円筒体(1) の外に設けられてお
り、しかも第２可動体(3) は円筒体(1) および第１可動
体(2) のどの部分とも接触しないで移動するので、粉塵
が発生することはない。The inside of the cylindrical body (1) is maintained in a vacuum state or a clean state if necessary. In that case, the first movable body
(2) and its driving means are provided outside the cylindrical body (1), and the second movable body (3) does not come into contact with any part of the cylindrical body (1) and the first movable body (2). As it moves, no dust is generated.
【００２０】なお、第１実施例において、他の適宜な手
段で第２可動体(3)を回転させることも可能である。In the first embodiment, the second movable body (3) can be rotated by other appropriate means.
【００２１】図２は、第２実施例を示している。FIG. 2 shows a second embodiment.
【００２２】第２実施例の場合も、非磁性体製の垂直円
筒体(7) の外側に第１可動体(8) が、同内側に第２可動
体(9) が配置されている。Also in the case of the second embodiment, a first movable body (8) is arranged outside a vertical cylindrical body (7) made of a non-magnetic material, and a second movable body (9) is arranged inside the same.
【００２３】第２可動体(9) は垂直円柱状をなし、回転
および上下方向の移動ができるように円筒体(7) 内に配
置されている。The second movable body (9) has a vertical columnar shape and is arranged in a cylindrical body (7) so as to be able to rotate and move in the vertical direction.
【００２４】第２可動体(9) の下端寄りの部分の外周面
に、円筒状の第１永久磁石部(10)と第２永久磁石部(11)
が上下に所定の間隔をあけて取付けられている。これら
の永久磁石部(10)(11)の上端部はＮ極、下端部はＳ極の
磁気を帯びており、回転軸心の周囲の磁束分布が回転に
よって変化しないようになっている。A cylindrical first permanent magnet portion (10) and a second permanent magnet portion (11) are provided on the outer peripheral surface of the portion near the lower end of the second movable body (9).
Are attached at predetermined intervals above and below. The upper ends of these permanent magnets (10) and (11) are magnetized with N poles and the lower ends are magnetized with S poles, so that the magnetic flux distribution around the rotation axis is not changed by rotation.
【００２５】第２可動体(9) の下端部外周面に磁気継手
(12)を構成する円筒状の内側永久磁石部(13)が取付けら
れている。なお、第１および第２永久磁石部(10)(11)な
らびに内側永久磁石部(13)の外径は、円筒体(7) の内径
より少し小さい。A magnetic coupling is provided on the outer peripheral surface of the lower end of the second movable body (9).
A cylindrical inner permanent magnet portion (13) constituting (12) is attached. The outer diameter of the first and second permanent magnet portions (10) and (11) and the inner permanent magnet portion (13) is slightly smaller than the inner diameter of the cylindrical body (7).
【００２６】第１可動体(8) は、円筒体(7) の周囲に密
にはめられた中空円環状の冷却ハウジング(14)と、その
下端面に軸受(19)を介して回転可能に取付けられた円環
状の回転部分(15)とからなる。冷却ハウジング(14)は、
上述の第１実施例に示したような駆動手段(D) により、
円筒体(7) に沿って上下に移動させられ、これによって
回転部分(15)も上下に移動させられる。また、回転部分
(15)は、たとえばモータなどの適宜な回転駆動手段(M)
により、冷却ハウジング(14)および円筒体(7)に対して
回転させられる。The first movable body (8) has a hollow annular cooling housing (14) closely fitted around a cylindrical body (7), and is rotatably mounted on a lower end surface thereof through a bearing (19). It has an annular rotating part (15) attached. The cooling housing (14)
By the driving means (D) as shown in the first embodiment,
It is moved up and down along the cylinder (7), whereby the rotating part (15) is also moved up and down. Also the rotating part
(15) is a suitable rotary drive means (M) such as a motor, for example.
As a result, it is rotated with respect to the cooling housing (14) and the cylindrical body (7).
【００２７】冷却ハウジング(14)内に、第１永久磁石部
(10)に対応する環状の第１超電導体(16)と、第２永久磁
石部(11)に対応する環状の第２超電導体(17)が上下に所
定の間隔をあけて収納されている。これらの超電導体(1
6)(17)は、第１実施例のものと同じである。A first permanent magnet section is provided in the cooling housing (14).
An annular first superconductor (16) corresponding to (10) and an annular second superconductor (17) corresponding to the second permanent magnet portion (11) are housed at predetermined intervals vertically. . These superconductors (1
6) and (17) are the same as those of the first embodiment.
【００２８】回転部分(15)の下端部内周面に、前記磁気
継手(12)を構成する環状の外側永久磁石部(18)が取付け
られている。磁気継手(12)はたとえば特公昭５６−１５
０６５０号公報などに記載されているような公知のもの
であり、２つの永久磁石部(13)(18)の吸引力により、こ
れらの一方の回転力が他方に伝達される。An annular outer permanent magnet portion (18) constituting the magnetic coupling (12) is attached to the inner peripheral surface of the lower end portion of the rotating portion (15). The magnetic coupling (12) is, for example,
The rotating force of one of these is transmitted to the other by the attraction force of the two permanent magnet portions (13, 18) as described in, for example, Japanese Patent No. 0650.
【００２９】第２実施例の場合も、対応する永久磁石部
(10)(11)と超電導体(16)(17)との保持力により、第２可
動体(9) が、円筒体(7) の内周面から少し離れた位置に
きわめて安定的に浮上した状態で、アキシアル方向およ
びラジアル方向に支持され、第１可動体(8) を上下に移
動させると、第２可動体(9) も上下に移動させられる。
また、第１可動体(8) の回転部分(15)を回転させると、
その外側永久磁石部(18)の回転力が内側永久磁石部(13)
に伝達され、第２可動体(9) が回転させられる。すなわ
ち、第２実施例の場合も、第１可動体(8) により、第２
可動体(9) が非接触で駆動される。Also in the case of the second embodiment, the corresponding permanent magnet
(10) Due to the holding force between (11) and the superconductors (16) and (17), the second movable body (9) floats very stably at a position slightly away from the inner peripheral surface of the cylindrical body (7). When the first movable body (8) is moved up and down in the axial and radial directions in this state, the second movable body (9) is also moved up and down.
When the rotating part (15) of the first movable body (8) is rotated,
The rotating force of the outer permanent magnet part (18) is
And the second movable body (9) is rotated. That is, also in the case of the second embodiment, the first movable body (8)
The movable body (9) is driven in a non-contact manner.
【００３０】[0030]
【発明の効果】この発明のスライド装置によれば、上述
のように、可動体を非接触で駆動することができ、粉塵
の発生などの問題が生じない。したがって、真空状態や
クリーン状態において好適に使用することができる。According to the slide device of the present invention, as described above, the movable body can be driven in a non-contact manner, and there is no problem such as generation of dust. Therefore, it can be suitably used in a vacuum state or a clean state.
【００３１】第１可動体の少なくとも一部および第２可
動体の少なくとも一部がそれぞれ固定部分に対して回転
可能になっており、これら２つの可動体の回転部分の間
に磁気継手手段が設けられ、２つ可動体の一方を回転駆
動させる回転駆動手段が設けられていれば、回転駆動手
段で可動体の一方を回転駆動させることにより、他方を
非接触で回転させることができ、回転と移動（リニアス
ライド）の両方の動きを必要とする用途に使用すること
が可能になる。At least a part of the first movable body and at least a part of the second movable body are respectively rotatable with respect to the fixed part, and magnetic coupling means is provided between the rotating parts of the two movable bodies. If there is provided a rotation driving means for rotationally driving one of the two movable bodies, by rotating one of the movable bodies by the rotation driving means, the other can be rotated in a non-contact manner. It can be used for applications that require both movements (linear slide).
【００３２】第１可動体の移動空間と第２可動体の移動
空間が非磁性体で隔絶されていれば、２つの可動体の一
方を他方から隔絶して真空状態またはクリーン状態に保
持するようなことができる。If the moving space of the first movable body and the moving space of the second movable body are separated by a non-magnetic material, one of the two movable bodies is separated from the other and held in a vacuum state or a clean state. Can do.
【図１】この発明の第１実施例を示すスライド装置の縦
断面図である。FIG. 1 is a longitudinal sectional view of a slide device according to a first embodiment of the present invention.
【図２】この発明の第２実施例を示すスライド装置の縦
断面図である。FIG. 2 is a longitudinal sectional view of a slide device according to a second embodiment of the present invention.
(1) 円筒体 (2) 第１可動体 (3) 第２可動体 (4) 永久磁石部 (6) 超電導体 (7) 円筒体 (8) 第１可動体 (9) 第２可動体 (10) 第１永久磁石部 (11) 第２永久磁石部 (12) 磁気継手 (13) 内側永久磁石部 (15) 回転部分 (16) 第１超電導体 (17) 第２超電導体 (18) 外側永久磁石部 (D) 駆動手段 (M) 回転駆動手段 (1) Cylindrical body (2) First movable body (3) Second movable body (4) Permanent magnet part (6) Superconductor (7) Cylindrical body (8) First movable body (9) Second movable body ( 10) First permanent magnet part (11) Second permanent magnet part (12) Magnetic coupling (13) Inner permanent magnet part (15) Rotating part (16) First superconductor (17) Second superconductor (18) Outside Permanent magnet part (D) Driving means (M) Rotation driving means
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H02N 15/00 H02N 49/00 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) H02N 15/00 H02N 49/00
Claims (3)
された第１可動体および第２可動体、２つの可動体のい
ずれか一方を移動させる駆動手段、２つの可動体の対向
面の一方に設けられた永久磁石部、ならびに上記対向面
の他方において上記永久磁石部の磁束が所定量侵入する
離間位置に設けられかつその内部に常電導粒子が混在さ
せられた超電導体を備えており、超電導体が冷却されて
超電導状態となったさいにその内部に侵入した永久磁石
部の磁束が常電導粒子により拘束されるようになされて
いるスライド装置。1. A driving means for moving one of a first movable body, a second movable body, and two movable bodies movably disposed with respect to a fixed portion, and one of opposing surfaces of the two movable bodies. The permanent magnet portion provided at the other side, and is provided at a separated position where the magnetic flux of the permanent magnet portion enters a predetermined amount on the other of the opposing surfaces, and normal conducting particles are mixed therein.
The superconductor is cooled and the superconductor is cooled.
Permanent magnet penetrated inside when it became superconductive
The magnetic flux of the part is made to be restrained by the normal conducting particles
Slide device it is.
動体の少なくとも一部がそれぞれ固定部分に対して回転
可能になっており、これら２つの可動体の回転部分の間
に磁気継手手段が設けられ、２つの可動体の一方を回転
駆動させる回転駆動手段が設けられている請求項１のス
ライド装置。2. A magnetic coupling means, wherein at least a part of the first movable body and at least a part of the second movable body are rotatable with respect to the fixed part, respectively, between the rotating parts of the two movable bodies. 2. The slide device according to claim 1, further comprising: a rotation driving unit that rotationally drives one of the two movable bodies.
空間が非磁性体で隔絶されている請求項１または２のス
ライド装置。3. The slide device according to claim 1, wherein the moving space of the first movable body and the moving space of the second movable body are separated by a non-magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04383891A JP3151492B2 (en) | 1991-03-08 | 1991-03-08 | Slide device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04383891A JP3151492B2 (en) | 1991-03-08 | 1991-03-08 | Slide device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04281377A JPH04281377A (en) | 1992-10-06 |
| JP3151492B2 true JP3151492B2 (en) | 2001-04-03 |
Family
ID=12674890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04383891A Expired - Fee Related JP3151492B2 (en) | 1991-03-08 | 1991-03-08 | Slide device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3151492B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100797594B1 (en) * | 1999-12-03 | 2008-01-28 | 가부시끼가이샤 도아 도네보오링 | Apparatus of multiple air-hammer and method for modifying a digging direction thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2799847B2 (en) * | 1996-01-31 | 1998-09-21 | 株式会社アバンアソシエイツ | Indoor space simulation creation device |
-
1991
- 1991-03-08 JP JP04383891A patent/JP3151492B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100797594B1 (en) * | 1999-12-03 | 2008-01-28 | 가부시끼가이샤 도아 도네보오링 | Apparatus of multiple air-hammer and method for modifying a digging direction thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04281377A (en) | 1992-10-06 |
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